Equivalent circuit of radio frequency-plasma with the transformer model

K. Nishida, S. Mochizuki, M. Ohta, M. Yasumoto, J. Lettry, S. Mattei, A. Hatayama

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

LINAC4 H- source is radio frequency (RF) driven type source. In the RF system, it is required to match the load impedance, which includes H- source, to that of final amplifier. We model RF plasma inside the H- source as circuit elements using transformer model so that characteristics of the load impedance become calculable. It has been shown that the modeling based on the transformer model works well to predict the resistance and inductance of the plasma.

Original languageEnglish
Article number02B117
JournalReview of Scientific Instruments
Volume85
Issue number2
DOIs
Publication statusPublished - 2014 Feb 1

ASJC Scopus subject areas

  • Instrumentation

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