Estimation and correction procedure for the effects of surface roughness on electron probe microanalysis

Akimasa Yamada, Paul J. Fons, Keiichiro Sakurai, Koji Matsubara, Kakuya Iwata, Shigeru Niki

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The magnitude of surface roughness effects on electron probe microanalysis (EPMA) has been theoretically calculated through geometrical considerations. The fact that estimated values match experimental data well suggests possible corrections for the data obtained from rough surfaces.

Original languageEnglish
Pages (from-to)5811-5812
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number9 A
DOIs
Publication statusPublished - 2003 Sep
Externally publishedYes

Keywords

  • EPMA
  • Electron probe microanalysis
  • Inclination
  • Surface roughness

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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