Estimation and correction procedure for the effects of surface roughness on electron probe microanalysis

Akimasa Yamada; Paul J. Fons; Keiichiro Sakurai; Koji Matsubara; Kakuya Iwata; Shigeru Niki

doi:10.1143/jjap.42.5811

Estimation and correction procedure for the effects of surface roughness on electron probe microanalysis

Akimasa Yamada, Paul J. Fons, Keiichiro Sakurai, Koji Matsubara, Kakuya Iwata, Shigeru Niki

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The magnitude of surface roughness effects on electron probe microanalysis (EPMA) has been theoretically calculated through geometrical considerations. The fact that estimated values match experimental data well suggests possible corrections for the data obtained from rough surfaces.

Original language	English
Pages (from-to)	5811-5812
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	42
Issue number	9 A
DOIs	https://doi.org/10.1143/jjap.42.5811
Publication status	Published - 2003 Sept
Externally published	Yes

Keywords

EPMA
Electron probe microanalysis
Inclination
Surface roughness

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.42.5811

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Estimation and correction procedure for the effects of surface roughness on electron probe microanalysis. / Yamada, Akimasa; Fons, Paul J.; Sakurai, Keiichiro et al.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 42, No. 9 A, 09.2003, p. 5811-5812.

Research output: Contribution to journal › Article › peer-review

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abstract = "The magnitude of surface roughness effects on electron probe microanalysis (EPMA) has been theoretically calculated through geometrical considerations. The fact that estimated values match experimental data well suggests possible corrections for the data obtained from rough surfaces.",

keywords = "EPMA, Electron probe microanalysis, Inclination, Surface roughness",

author = "Akimasa Yamada and Fons, {Paul J.} and Keiichiro Sakurai and Koji Matsubara and Kakuya Iwata and Shigeru Niki",

year = "2003",

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AU - Yamada, Akimasa

AU - Fons, Paul J.

AU - Sakurai, Keiichiro

AU - Matsubara, Koji

AU - Iwata, Kakuya

AU - Niki, Shigeru

PY - 2003/9

Y1 - 2003/9

N2 - The magnitude of surface roughness effects on electron probe microanalysis (EPMA) has been theoretically calculated through geometrical considerations. The fact that estimated values match experimental data well suggests possible corrections for the data obtained from rough surfaces.

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KW - Electron probe microanalysis

KW - Inclination

KW - Surface roughness

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ER -

Estimation and correction procedure for the effects of surface roughness on electron probe microanalysis

Abstract

Keywords

ASJC Scopus subject areas

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