Abstract
CrN, CrTiN, CrAlN and CrTiAlN coatings were deposited on Si (100) wafers, and their microstructure, mechanical properties, fracture toughness and adhesive strength were investigated via X-ray diffraction (XRD), nanoindentation and micro-scratch tests. Besides an F.C.C. crystal structure, TiN0.3 (004) and AlN (222) phases were found in the CrTiN and CrAlN coatings while the crystallinity of the CrTiAlN coating decreased. The hardness of the CrN (14.5GPa), CrTiN (13.9GPa) and CrAlN (17.7GPa) coatings was determined by their grain sizes while the CrTiAlN coating with the most compact morphology exhibited the highest hardness of 22.0GPa. In addition, CrTiN (KIc=2.73MPa·m), CrAlN (KIc=2.70MPa·m) and CrTiAlN coatings showed a stronger crack resistance than the CrN coating (KIc=1.06MPa·m), especially the CrTiAlN coating without any radial cracks. However, the CrTiAlN coating encountered circumferential cracks and premature delamination (Adhesive energy Gc=70J/m2) because of its highest compressive stress (4.64GPa). Based on the results here, it is concluded that a decent compressive stress of 3.0GPa is expected to help thin films prevent from radial and circumferential cracks simultaneously.
| Original language | English |
|---|---|
| Pages (from-to) | 203-213 |
| Number of pages | 11 |
| Journal | Surface and Coatings Technology |
| Volume | 285 |
| DOIs | |
| Publication status | Published - 2016 Jan 15 |
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Keywords
- Cr-Ti-Al-N
- Fracture toughness
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Materials Chemistry
- Surfaces, Coatings and Films
- Surfaces and Interfaces
Cite this
Evaluating mechanical properties and crack resistance of CrN, CrTiN, CrAlN and CrTiAlN coatings by nanoindentation and scratch tests. / Wang, Qianzhi; Zhou, Fei; Yan, Jiwang.
In: Surface and Coatings Technology, Vol. 285, 15.01.2016, p. 203-213.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Evaluating mechanical properties and crack resistance of CrN, CrTiN, CrAlN and CrTiAlN coatings by nanoindentation and scratch tests
AU - Wang, Qianzhi
AU - Zhou, Fei
AU - Yan, Jiwang
PY - 2016/1/15
Y1 - 2016/1/15
N2 - CrN, CrTiN, CrAlN and CrTiAlN coatings were deposited on Si (100) wafers, and their microstructure, mechanical properties, fracture toughness and adhesive strength were investigated via X-ray diffraction (XRD), nanoindentation and micro-scratch tests. Besides an F.C.C. crystal structure, TiN0.3 (004) and AlN (222) phases were found in the CrTiN and CrAlN coatings while the crystallinity of the CrTiAlN coating decreased. The hardness of the CrN (14.5GPa), CrTiN (13.9GPa) and CrAlN (17.7GPa) coatings was determined by their grain sizes while the CrTiAlN coating with the most compact morphology exhibited the highest hardness of 22.0GPa. In addition, CrTiN (KIc=2.73MPa·m), CrAlN (KIc=2.70MPa·m) and CrTiAlN coatings showed a stronger crack resistance than the CrN coating (KIc=1.06MPa·m), especially the CrTiAlN coating without any radial cracks. However, the CrTiAlN coating encountered circumferential cracks and premature delamination (Adhesive energy Gc=70J/m2) because of its highest compressive stress (4.64GPa). Based on the results here, it is concluded that a decent compressive stress of 3.0GPa is expected to help thin films prevent from radial and circumferential cracks simultaneously.
AB - CrN, CrTiN, CrAlN and CrTiAlN coatings were deposited on Si (100) wafers, and their microstructure, mechanical properties, fracture toughness and adhesive strength were investigated via X-ray diffraction (XRD), nanoindentation and micro-scratch tests. Besides an F.C.C. crystal structure, TiN0.3 (004) and AlN (222) phases were found in the CrTiN and CrAlN coatings while the crystallinity of the CrTiAlN coating decreased. The hardness of the CrN (14.5GPa), CrTiN (13.9GPa) and CrAlN (17.7GPa) coatings was determined by their grain sizes while the CrTiAlN coating with the most compact morphology exhibited the highest hardness of 22.0GPa. In addition, CrTiN (KIc=2.73MPa·m), CrAlN (KIc=2.70MPa·m) and CrTiAlN coatings showed a stronger crack resistance than the CrN coating (KIc=1.06MPa·m), especially the CrTiAlN coating without any radial cracks. However, the CrTiAlN coating encountered circumferential cracks and premature delamination (Adhesive energy Gc=70J/m2) because of its highest compressive stress (4.64GPa). Based on the results here, it is concluded that a decent compressive stress of 3.0GPa is expected to help thin films prevent from radial and circumferential cracks simultaneously.
KW - Cr-Ti-Al-N
KW - Fracture toughness
UR - http://www.scopus.com/inward/record.url?scp=84955086253&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84955086253&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2015.11.040
DO - 10.1016/j.surfcoat.2015.11.040
M3 - Article
AN - SCOPUS:84955086253
VL - 285
SP - 203
EP - 213
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -