Abstract
The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF<inf>2</inf>) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF<inf>2</inf> optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.
| Original language | English |
|---|---|
| Pages (from-to) | 117-120 |
| Number of pages | 4 |
| Journal | CIRP Annals - Manufacturing Technology |
| Volume | 64 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2015 |
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Keywords
- Optical micro-resonator
- Surface integrity
- Ultra-precision
ASJC Scopus subject areas
- Mechanical Engineering
- Industrial and Manufacturing Engineering
Cite this
Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF<inf>2</inf> optical micro resonator. / Kakinuma, Yasuhiro; Azami, Shunya; Tanabe, Takasumi.
In: CIRP Annals - Manufacturing Technology, Vol. 64, No. 1, 2015, p. 117-120.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF2 optical micro resonator
AU - Kakinuma, Yasuhiro
AU - Azami, Shunya
AU - Tanabe, Takasumi
PY - 2015
Y1 - 2015
N2 - The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF2) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF2 optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.
AB - The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF2) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF2 optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.
KW - Optical micro-resonator
KW - Surface integrity
KW - Ultra-precision
UR - http://www.scopus.com/inward/record.url?scp=84933678455&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84933678455&partnerID=8YFLogxK
U2 - 10.1016/j.cirp.2015.04.076
DO - 10.1016/j.cirp.2015.04.076
M3 - Article
VL - 64
SP - 117
EP - 120
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
SN - 0007-8506
IS - 1
ER -