Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF2 optical micro resonator

Yasuhiro Kakinuma; Shunya Azami; Takasumi Tanabe

doi:10.1016/j.cirp.2015.04.076

Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF₂ optical micro resonator

Yasuhiro Kakinuma, Shunya Azami, Takasumi Tanabe

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF₂) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF₂ optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.

Original language	English
Pages (from-to)	117-120
Number of pages	4
Journal	CIRP Annals
Volume	64
Issue number	1
DOIs	https://doi.org/10.1016/j.cirp.2015.04.076
Publication status	Published - 2015

Keywords

Optical micro-resonator
Surface integrity
Ultra-precision

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

Access to Document

10.1016/j.cirp.2015.04.076

Cite this

@article{b5386c89f87f4d43a6f4ffad04bb38d2,

title = "Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF2 optical micro resonator",

abstract = "The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF2) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF2 optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.",

keywords = "Optical micro-resonator, Surface integrity, Ultra-precision",

author = "Yasuhiro Kakinuma and Shunya Azami and Takasumi Tanabe",

note = "Publisher Copyright: {\textcopyright} 2015 CIRP.",

year = "2015",

doi = "10.1016/j.cirp.2015.04.076",

language = "English",

volume = "64",

pages = "117--120",

journal = "CIRP Annals - Manufacturing Technology",

issn = "0007-8506",

publisher = "Elsevier USA",

number = "1",

}

TY - JOUR

T1 - Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF2 optical micro resonator

AU - Kakinuma, Yasuhiro

AU - Azami, Shunya

AU - Tanabe, Takasumi

PY - 2015

Y1 - 2015

N2 - The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF2) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF2 optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.

AB - The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF2) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF2 optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.

KW - Optical micro-resonator

KW - Surface integrity

KW - Ultra-precision

UR - http://www.scopus.com/inward/record.url?scp=84933678455&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84933678455&partnerID=8YFLogxK

U2 - 10.1016/j.cirp.2015.04.076

DO - 10.1016/j.cirp.2015.04.076

M3 - Article

AN - SCOPUS:84933678455

VL - 64

SP - 117

EP - 120

JO - CIRP Annals - Manufacturing Technology

JF - CIRP Annals - Manufacturing Technology

SN - 0007-8506

IS - 1

ER -