Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF<inf>2</inf> optical micro resonator

Yasuhiro Kakinuma; Shunya Azami; Takasumi Tanabe

doi:10.1016/j.cirp.2015.04.076

Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF<inf>2</inf> optical micro resonator

Yasuhiro Kakinuma, Shunya Azami, Takasumi Tanabe

Department of System Design Engineering

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF<inf>2</inf>) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF<inf>2</inf> optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.

Original language	English
Pages (from-to)	117-120
Number of pages	4
Journal	CIRP Annals - Manufacturing Technology
Volume	64
Issue number	1
DOIs	https://doi.org/10.1016/j.cirp.2015.04.076
Publication status	Published - 2015

Keywords

Optical micro-resonator
Surface integrity
Ultra-precision

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

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abstract = "The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF2) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF2 optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.",

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