Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF<inf>2</inf> optical micro resonator

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF<inf>2</inf>) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF<inf>2</inf> optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.

Original languageEnglish
Pages (from-to)117-120
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume64
Issue number1
DOIs
Publication statusPublished - 2015

Keywords

  • Optical micro-resonator
  • Surface integrity
  • Ultra-precision

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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