The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF<inf>2</inf>) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF<inf>2</inf> optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.
- Optical micro-resonator
- Surface integrity
ASJC Scopus subject areas
- Mechanical Engineering
- Industrial and Manufacturing Engineering