Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography

Kyosuke Muramatsu; Hideaki Asakura; Keijiro Suzuki; Ken Tanizawa; Munehiro Toyama; Minoru Ohtsuka; Nobuyuki Yokoyama; Kazuyuki Matsumaro; Miyoshi Seki; Keiji Koshino; Kazuhiro Ikeda; Shu Namiki; Hitoshi Kawashima; Hiroyuki Tsuda

doi:10.1587/elex.12.20150019

Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography

Kyosuke Muramatsu, Hideaki Asakura, Keijiro Suzuki, Ken Tanizawa, Munehiro Toyama, Minoru Ohtsuka, Nobuyuki Yokoyama, Kazuyuki Matsumaro, Miyoshi Seki, Keiji Koshino, Kazuhiro Ikeda, Shu Namiki, Hitoshi Kawashima, Hiroyuki Tsuda

Department of Electronics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The phase errors in 100-GHz spacing, 8-ch, Si-wire arrayedwaveguide gratings (AWG) fabricated by ArF-immersion photolithography were measured by the frequency-domain interference method. To our knowledge, this is the first time phase error measurements in a Si-wire AWG have been performed. By comparing the reconstructed transmission spectrum to the directly measured spectrum, the accuracy of this phase error measurement was confirmed. The average phase error in the AWGs on 6 chips was 0.27π radian, and this value is equivalent to a fluctuation in the effective refractive index of 1.1 × 10⁻⁴.

Original language	English
Article number	20150019
Journal	IEICE Electronics Express
Volume	12
Issue number	7
DOIs	https://doi.org/10.1587/elex.12.20150019
Publication status	Published - 2015 Apr 10

Keywords

Phase error measurement
Si-wire arrayed-waveguide grating

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1587/elex.12.20150019

Fingerprint Dive into the research topics of 'Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography'. Together they form a unique fingerprint.

Cite this

Muramatsu, K., Asakura, H., Suzuki, K., Tanizawa, K., Toyama, M., Ohtsuka, M., Yokoyama, N., Matsumaro, K., Seki, M., Koshino, K., Ikeda, K., Namiki, S., Kawashima, H., & Tsuda, H. (2015). Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography. IEICE Electronics Express, 12(7), [20150019]. https://doi.org/10.1587/elex.12.20150019

Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography. / Muramatsu, Kyosuke; Asakura, Hideaki; Suzuki, Keijiro; Tanizawa, Ken; Toyama, Munehiro; Ohtsuka, Minoru; Yokoyama, Nobuyuki; Matsumaro, Kazuyuki; Seki, Miyoshi; Koshino, Keiji; Ikeda, Kazuhiro; Namiki, Shu; Kawashima, Hitoshi; Tsuda, Hiroyuki.

In: IEICE Electronics Express, Vol. 12, No. 7, 20150019, 10.04.2015.

Research output: Contribution to journal › Article › peer-review

Muramatsu, K, Asakura, H, Suzuki, K, Tanizawa, K, Toyama, M, Ohtsuka, M, Yokoyama, N, Matsumaro, K, Seki, M, Koshino, K, Ikeda, K, Namiki, S, Kawashima, H & Tsuda, H 2015, 'Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography', IEICE Electronics Express, vol. 12, no. 7, 20150019. https://doi.org/10.1587/elex.12.20150019

Muramatsu, Kyosuke ; Asakura, Hideaki ; Suzuki, Keijiro ; Tanizawa, Ken ; Toyama, Munehiro ; Ohtsuka, Minoru ; Yokoyama, Nobuyuki ; Matsumaro, Kazuyuki ; Seki, Miyoshi ; Koshino, Keiji ; Ikeda, Kazuhiro ; Namiki, Shu ; Kawashima, Hitoshi ; Tsuda, Hiroyuki. / Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography. In: IEICE Electronics Express. 2015 ; Vol. 12, No. 7.

@article{13564d84dc3f4b37a4638f6cb1d7f4b4,

title = "Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography",

abstract = "The phase errors in 100-GHz spacing, 8-ch, Si-wire arrayedwaveguide gratings (AWG) fabricated by ArF-immersion photolithography were measured by the frequency-domain interference method. To our knowledge, this is the first time phase error measurements in a Si-wire AWG have been performed. By comparing the reconstructed transmission spectrum to the directly measured spectrum, the accuracy of this phase error measurement was confirmed. The average phase error in the AWGs on 6 chips was 0.27π radian, and this value is equivalent to a fluctuation in the effective refractive index of 1.1 × 10−4.",

keywords = "Phase error measurement, Si-wire arrayed-waveguide grating",

author = "Kyosuke Muramatsu and Hideaki Asakura and Keijiro Suzuki and Ken Tanizawa and Munehiro Toyama and Minoru Ohtsuka and Nobuyuki Yokoyama and Kazuyuki Matsumaro and Miyoshi Seki and Keiji Koshino and Kazuhiro Ikeda and Shu Namiki and Hitoshi Kawashima and Hiroyuki Tsuda",

year = "2015",

month = apr,

day = "10",

doi = "10.1587/elex.12.20150019",

language = "English",

volume = "12",

journal = "IEICE Electronics Express",

issn = "1349-2543",

publisher = "The Institute of Electronics, Information and Communication Engineers (IEICE)",

number = "7",

}

TY - JOUR

T1 - Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography

AU - Muramatsu, Kyosuke

AU - Asakura, Hideaki

AU - Suzuki, Keijiro

AU - Tanizawa, Ken

AU - Toyama, Munehiro

AU - Ohtsuka, Minoru

AU - Yokoyama, Nobuyuki

AU - Matsumaro, Kazuyuki

AU - Seki, Miyoshi

AU - Koshino, Keiji

AU - Ikeda, Kazuhiro

AU - Namiki, Shu

AU - Kawashima, Hitoshi

AU - Tsuda, Hiroyuki

PY - 2015/4/10

Y1 - 2015/4/10

N2 - The phase errors in 100-GHz spacing, 8-ch, Si-wire arrayedwaveguide gratings (AWG) fabricated by ArF-immersion photolithography were measured by the frequency-domain interference method. To our knowledge, this is the first time phase error measurements in a Si-wire AWG have been performed. By comparing the reconstructed transmission spectrum to the directly measured spectrum, the accuracy of this phase error measurement was confirmed. The average phase error in the AWGs on 6 chips was 0.27π radian, and this value is equivalent to a fluctuation in the effective refractive index of 1.1 × 10−4.

AB - The phase errors in 100-GHz spacing, 8-ch, Si-wire arrayedwaveguide gratings (AWG) fabricated by ArF-immersion photolithography were measured by the frequency-domain interference method. To our knowledge, this is the first time phase error measurements in a Si-wire AWG have been performed. By comparing the reconstructed transmission spectrum to the directly measured spectrum, the accuracy of this phase error measurement was confirmed. The average phase error in the AWGs on 6 chips was 0.27π radian, and this value is equivalent to a fluctuation in the effective refractive index of 1.1 × 10−4.

KW - Phase error measurement

KW - Si-wire arrayed-waveguide grating

UR - http://www.scopus.com/inward/record.url?scp=84927584033&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84927584033&partnerID=8YFLogxK

U2 - 10.1587/elex.12.20150019

DO - 10.1587/elex.12.20150019

M3 - Article

AN - SCOPUS:84927584033

VL - 12

JO - IEICE Electronics Express

JF - IEICE Electronics Express

SN - 1349-2543

IS - 7

M1 - 20150019

ER -