The inversion-layer electron mobility limited by Coulomb scattering due to interface states (μit) and substrate impurities (μsub) are experimentally evaluated on Si n-type metal-oxide-semiconductor field-effect transistors (MOSFETs) at the surfaces of Si(100), (110), and (111). The inversionlayer mobility is measured by the split C-V method and μit and μsub are extracted using Matthiessen's rule. μit exhibits almost the same behavior irrespective of the different surface orientations, while μsub has the surface orientation dependence. The very weak surface orientation dependence of μit are due to the correlation between the inversion layer thickness (Zave) determined by the normal mass (mz) and the weighed average value of conductivity mass (mc-ave) under multi valley occupation. The surface orientation dependence of μsub is basically explained by the mc ave difference.
ASJC Scopus subject areas
- Physics and Astronomy(all)