Experimental study of very-high-frequency plasmas in H2 by spatiotemporally resolved optical emission spectroscopy

Shigeru Kakuta, Takeshi Kitajima, Yutaka Okabe, Toshiaki Makabe

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

A very-high-frequency (VHF) plasma at 100 MHz is experimentally investigated in parallel-plate configuration in H2 using spatiotemporal optical emission spectroscopy and current-voltage-power waveforms. The observed optical emission intensity and net excitation rate profiles have strong temporal and spatial variations. The VHF plasma is still capacitive, and is maintained by reflected electrons in the oscillating sheath next to the instantaneous cathode. The characteristics of VHF plasmas, that the excitation rate increases in proportion to the square of driving frequency, and that the minimum sustaining voltage and pressure decrease with increasing frequency, are experimentally confirmed at pressures, ranging from 0.01 to 2 Torr and at the frequency of 100 MHz.

Original languageEnglish
Pages (from-to)4335-4339
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume33
Issue number7 B
Publication statusPublished - 1994 Jul

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Optical emission spectroscopy
very high frequencies
optical emission spectroscopy
Plasmas
sustaining
Electric potential
electric potential
parallel plates
sheaths
excitation
light emission
proportion
waveforms
Cathodes
cathodes
Electrons
profiles
configurations
electrons

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Experimental study of very-high-frequency plasmas in H2 by spatiotemporally resolved optical emission spectroscopy. / Kakuta, Shigeru; Kitajima, Takeshi; Okabe, Yutaka; Makabe, Toshiaki.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 33, No. 7 B, 07.1994, p. 4335-4339.

Research output: Contribution to journalArticle

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