Fabrication method of sub-micrometer size planar gap for the micro fabry-perot interferometer

T. Dohi; H. Hayashi; H. Onoe; K. Matsumoto; I. Shimoyama

doi:10.1109/MEMSYS.2008.4443661

Fabrication method of sub-micrometer size planar gap for the micro fabry-perot interferometer

T. Dohi, H. Hayashi, H. Onoe, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

This paper reports on a fabrication method of sub-micrometer size tunable planar gaps for micro Fabry-Perot interferometers. We made an upper unit with a movable sub-micrometer step and a lower unit, separately. The upper unit was picked up and transferred to the lower unit by the stamping apparatus, and bonded to the lower unit by fusion bonding. Since the force during fusion bonding acts within a few nanometers only, the sub-micrometer size planar gap can be built. By using this fabrication method, we fabricated the 850 nm gap with a movable planar mirror of 500 μm in diameter. The gap was changed from 825 nm to 1020 nm by applying the voltage of 24 V.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	335-338
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443661
Publication status	Published - 2008 Aug 29
Externally published	Yes
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 2008 Jan 13 → 2008 Jan 17

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	08/1/13 → 08/1/17

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2008.4443661

Cite this

Dohi, T., Hayashi, H., Onoe, H., Matsumoto, K., & Shimoyama, I. (2008). Fabrication method of sub-micrometer size planar gap for the micro fabry-perot interferometer. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 335-338). [4443661] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443661

Fabrication method of sub-micrometer size planar gap for the micro fabry-perot interferometer. / Dohi, T.; Hayashi, H.; Onoe, H. et al.
MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 335-338 4443661 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Dohi, T, Hayashi, H, Onoe, H, Matsumoto, K & Shimoyama, I 2008, Fabrication method of sub-micrometer size planar gap for the micro fabry-perot interferometer. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443661, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 335-338, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443661

Dohi T, Hayashi H, Onoe H, Matsumoto K, Shimoyama I. Fabrication method of sub-micrometer size planar gap for the micro fabry-perot interferometer. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 335-338. 4443661. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2008.4443661

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Fabrication method of sub-micrometer size planar gap for the micro fabry-perot interferometer

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