FABRICATION OF A NANOSCALE CURVED STRUCTURE AND APPLICATION TO NANOCHANNEL OPEN/CLOSE VALVE

Hiroki Sano, Yutaka Kazoe, Kyojiro Morikawa, Takehiko Kitamori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We developed a fabrication method of a curved valve chamber for a nanochannel open/close valve on a glass substrate and succeeded in reducing leakage of the valve. Previously, we developed a nanochannel open/close valve utilizing glass deformation, but since the curved deflection of glass could not completely block the rectangular channels, leakage by solute diffusion was inevitable. Herein, we conceived pressing the valve repeatedly and deform the valve chamber to the shape of the glass deflection curve. After 20,000 times of pressing, a curved valve chamber was successfully fabricated and the leakage was reduced to 1.3 % with this valve.

Original languageEnglish
Title of host publicationMicroTAS 2021 - 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherChemical and Biological Microsystems Society
Pages1399-1400
Number of pages2
ISBN (Electronic)9781733419031
Publication statusPublished - 2021
Event25th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2021 - Palm Springs, Virtual, United States
Duration: 2021 Oct 102021 Oct 14

Publication series

NameMicroTAS 2021 - 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Conference

Conference25th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2021
Country/TerritoryUnited States
CityPalm Springs, Virtual
Period21/10/1021/10/14

Keywords

  • fabrication
  • fluid operation
  • nanochannel
  • Nanofluidics
  • open/close
  • valve

ASJC Scopus subject areas

  • Bioengineering
  • Chemical Engineering (miscellaneous)

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