TY - JOUR
T1 - Fabrication of deep micro-holes in reaction-bonded SiC by ultrasonic cavitation assisted micro-EDM
AU - Liew, Pay Jun
AU - Yan, Jiwang
AU - Kuriyagawa, Tsunemoto
N1 - Funding Information:
The authors would like to thank Taga Denki Co., Ltd., Japan for providing the ultrasonic cavitation equipment. Professor Hitoshi Soyama of Department of Nanomechanics, Tohoku University is gratefully acknowledged for his valuable comments and advices. One of the authors P.J. Liew acknowledges the financial support from Ministry of Higher Education (MoHE) and Universiti Teknikal Malaysia Melaka (UTeM) for her Ph.D. scholarship.
Copyright:
Copyright 2013 Elsevier B.V., All rights reserved.
PY - 2014
Y1 - 2014
N2 - Ultrasonic vibration was applied to dielectric fluid by a probe-type vibrator to assist micro electrical discharge machining of deep micro-holes in ceramic materials. Changes of machined hole depth, hole geometry, surface topography, machining stability and tool material deposition under various machining conditions were investigated. Results show that ultrasonic vibration not only induces stirring effect, but also causes cloud cavitation effect which is helpful for removing debris and preventing tool material deposition on machined surface. The machining characteristics are strongly affected by the vibration amplitude, and the best machining performance is obtained when carbon nanofibers are added into the vibrated dielectric fluid. As test pieces, micro-holes having 10 μm level diameters and high aspect ratios (>20) were successfully fabricated on reaction-bonded silicon carbide in a few minutes. The hybrid EDM process combining ultrasonic cavitation and carbon nanofiber addition is demonstrated to be useful for fabricating microstructures on hard brittle ceramic materials.
AB - Ultrasonic vibration was applied to dielectric fluid by a probe-type vibrator to assist micro electrical discharge machining of deep micro-holes in ceramic materials. Changes of machined hole depth, hole geometry, surface topography, machining stability and tool material deposition under various machining conditions were investigated. Results show that ultrasonic vibration not only induces stirring effect, but also causes cloud cavitation effect which is helpful for removing debris and preventing tool material deposition on machined surface. The machining characteristics are strongly affected by the vibration amplitude, and the best machining performance is obtained when carbon nanofibers are added into the vibrated dielectric fluid. As test pieces, micro-holes having 10 μm level diameters and high aspect ratios (>20) were successfully fabricated on reaction-bonded silicon carbide in a few minutes. The hybrid EDM process combining ultrasonic cavitation and carbon nanofiber addition is demonstrated to be useful for fabricating microstructures on hard brittle ceramic materials.
KW - Carbon nanofiber
KW - Cavitation
KW - Ceramic material
KW - Micro-electro discharge machining
KW - Reaction-bonded silicon carbide
KW - Ultrasonic vibration
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U2 - 10.1016/j.ijmachtools.2013.09.010
DO - 10.1016/j.ijmachtools.2013.09.010
M3 - Article
AN - SCOPUS:84886415069
SN - 0890-6955
VL - 76
SP - 13
EP - 20
JO - International Journal of Machine Tool Design & Research
JF - International Journal of Machine Tool Design & Research
ER -