Fabrication of gate-all-around MOSFET by silicon anisotropic etching technique

Toshikazu Mukaiyama, Ken Ichi Saito, Hiroki Ishikuro, Makoto Takamiya, Takuya Saraya, Toshiro Hiramoto

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication of gate-all-around MOSFET by silicon anisotropic etching technique'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds