Fabrication of germanium nanodisk array by neutral beam etching with protein as etching mask

Takuya Fujii, Takeru Okada, Taiga Isoda, Mohd Erman Syazwan, Mohamed Tahar Chentir, Kohei M. Itoh, Ichiro Yamashita, Seiji Samukawa

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2 Citations (Scopus)

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