Fabrication of hexagonal microlens arrays on single-crystal silicon using the tool-servo driven segment turning method

Mao Mukaida, Jiwang Yan

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication of hexagonal microlens arrays on single-crystal silicon using the tool-servo driven segment turning method'. Together they form a unique fingerprint.

Engineering & Materials Science