Abstract
High curvature micro lens array of 240-570 μm diameters and 110-270 μm heights has been fabricated by using UV-LED lithography and imprinting technique. Curved SU-8 structures were fabricated by backside exposure through thin glass substrate because UV-LED array light source has wide directivity characteristics of UV dose. The structure was transferred to Polydimethylsiloxsane (PDMS) mold. Micro lens array of photosensitive acrylic resin was fabricated by using the mold.
| Original language | English |
|---|---|
| Pages (from-to) | 363-364 |
| Number of pages | 2 |
| Journal | ieej transactions on sensors and micromachines |
| Volume | 129 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 2009 |
Keywords
- Curved surface structure
- Imprinting technique
- Micro lens
- Photolithography
- UV-LED
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering