Fabrication of micro lens array by UV-LED lithography

Yusuke Iguchi, Yoshinori Matsumoto

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

High curvature micro lens array of 240-570 μm diameters and 110-270 μm heights has been fabricated by using UV-LED lithography and imprinting technique. Curved SU-8 structures were fabricated by backside exposure through thin glass substrate because UV-LED array light source has wide directivity characteristics of UV dose. The structure was transferred to Polydimethylsiloxsane (PDMS) mold. Micro lens array of photosensitive acrylic resin was fabricated by using the mold.

Original languageEnglish
Pages (from-to)363-364
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume129
Issue number10
DOIs
Publication statusPublished - 2009

    Fingerprint

Keywords

  • Curved surface structure
  • Imprinting technique
  • Micro lens
  • Photolithography
  • UV-LED

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this