Fabrication of periodic metal nanowire grating and dotted structures on silica substrate by femtosecond laser irradiation

Y. Nakajima, M. Terakawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A method to fabricate metal nanowire gratings and dotted structures on substrates by using femtosecond laser is proposed and experimentally demonstrated. By irradiating femtosecond laser pulses to a platinum thin film deposited on a fused silica substrate, platinum nanowire gratings, which periodicities were comparable to or less than half the laser wavelength, were fabricated. The structures were experimentally analyzed with scanning electron microscopy (SEM), cross sectional imaging with focused ion beam (FIB), and atomic force microscopy (AFM). Moreover, dotted structures were formed in a self-organized manner by changing the number of pulses. The method presented has potential to be used as a simple and high-throughput process for fabrication of metal nanostructures for optical, electrical, and biomedical devices.

Original languageEnglish
Title of host publicationLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
EditorsStephan Roth, Xianfan Xu, Yoshiki Nakata, Beat Neuenschwander
PublisherSPIE
ISBN (Electronic)9781628414400
DOIs
Publication statusPublished - 2015 Jan 1
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - San Francisco, United States
Duration: 2015 Feb 92015 Feb 12

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9350
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
CountryUnited States
CitySan Francisco
Period15/2/915/2/12

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Keywords

  • dotted structures
  • femtosecond laser
  • nanowire gratings
  • periodic structure
  • plasmonic
  • platinum

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Nakajima, Y., & Terakawa, M. (2015). Fabrication of periodic metal nanowire grating and dotted structures on silica substrate by femtosecond laser irradiation. In S. Roth, X. Xu, Y. Nakata, & B. Neuenschwander (Eds.), Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX [935002] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9350). SPIE. https://doi.org/10.1117/12.2078460