Fabrication of periodic metal nanowire grating and dotted structures on silica substrate by femtosecond laser irradiation

Y. Nakajima, M. Terakawa

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    A method to fabricate metal nanowire gratings and dotted structures on substrates by using femtosecond laser is proposed and experimentally demonstrated. By irradiating femtosecond laser pulses to a platinum thin film deposited on a fused silica substrate, platinum nanowire gratings, which periodicities were comparable to or less than half the laser wavelength, were fabricated. The structures were experimentally analyzed with scanning electron microscopy (SEM), cross sectional imaging with focused ion beam (FIB), and atomic force microscopy (AFM). Moreover, dotted structures were formed in a self-organized manner by changing the number of pulses. The method presented has potential to be used as a simple and high-throughput process for fabrication of metal nanostructures for optical, electrical, and biomedical devices.

    Original languageEnglish
    Title of host publicationLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
    EditorsStephan Roth, Xianfan Xu, Yoshiki Nakata, Beat Neuenschwander
    PublisherSPIE
    ISBN (Electronic)9781628414400
    DOIs
    Publication statusPublished - 2015 Jan 1
    EventLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - San Francisco, United States
    Duration: 2015 Feb 92015 Feb 12

    Publication series

    NameProceedings of SPIE - The International Society for Optical Engineering
    Volume9350
    ISSN (Print)0277-786X
    ISSN (Electronic)1996-756X

    Other

    OtherLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
    CountryUnited States
    CitySan Francisco
    Period15/2/915/2/12

    Keywords

    • dotted structures
    • femtosecond laser
    • nanowire gratings
    • periodic structure
    • plasmonic
    • platinum

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Computer Science Applications
    • Applied Mathematics
    • Electrical and Electronic Engineering

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  • Cite this

    Nakajima, Y., & Terakawa, M. (2015). Fabrication of periodic metal nanowire grating and dotted structures on silica substrate by femtosecond laser irradiation. In S. Roth, X. Xu, Y. Nakata, & B. Neuenschwander (Eds.), Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX [935002] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9350). SPIE. https://doi.org/10.1117/12.2078460