Fabrication of polymeric dry microneedle electrodes coated with nanoporous parylene

Y. Nishinaka, R. Jun, G. S. Prihandana, N. Miki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

In this study, we demonstrate the fabrication of polymeric dry microneedle electrodes covered with nanoporous parylene film that can be applicable as flexible electrodes for biopotential measurements. For the application, polymer microneedles must be stiff enough to penetrate through the high-impedance stratum corneum without reaching the dermis. We successfully manufactured a 20 × 20 polymer microneedle electrode, with a needle length of 200 μm and a tip curvature radius of 15 μm. We experimentally verified that sufficiently low electric impedance was achieved at the pressure of 8 N without the skin preparation and electrolytic gel.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1326-1327
Number of pages2
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 2013 Jun 162013 Jun 20

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period13/6/1613/6/20

Keywords

  • Biopotential measurement
  • Electrode
  • Microneedle
  • Nanoporous
  • Parylene

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Nishinaka, Y., Jun, R., Prihandana, G. S., & Miki, N. (2013). Fabrication of polymeric dry microneedle electrodes coated with nanoporous parylene. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 1326-1327). [6627021] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627021