TY - GEN
T1 - Fabrication of polymeric dry microneedle electrodes coated with nanoporous parylene
AU - Nishinaka, Y.
AU - Jun, R.
AU - Prihandana, G. S.
AU - Miki, N.
PY - 2013/12/1
Y1 - 2013/12/1
N2 - In this study, we demonstrate the fabrication of polymeric dry microneedle electrodes covered with nanoporous parylene film that can be applicable as flexible electrodes for biopotential measurements. For the application, polymer microneedles must be stiff enough to penetrate through the high-impedance stratum corneum without reaching the dermis. We successfully manufactured a 20 × 20 polymer microneedle electrode, with a needle length of 200 μm and a tip curvature radius of 15 μm. We experimentally verified that sufficiently low electric impedance was achieved at the pressure of 8 N without the skin preparation and electrolytic gel.
AB - In this study, we demonstrate the fabrication of polymeric dry microneedle electrodes covered with nanoporous parylene film that can be applicable as flexible electrodes for biopotential measurements. For the application, polymer microneedles must be stiff enough to penetrate through the high-impedance stratum corneum without reaching the dermis. We successfully manufactured a 20 × 20 polymer microneedle electrode, with a needle length of 200 μm and a tip curvature radius of 15 μm. We experimentally verified that sufficiently low electric impedance was achieved at the pressure of 8 N without the skin preparation and electrolytic gel.
KW - Biopotential measurement
KW - Electrode
KW - Microneedle
KW - Nanoporous
KW - Parylene
UR - http://www.scopus.com/inward/record.url?scp=84891699558&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891699558&partnerID=8YFLogxK
U2 - 10.1109/Transducers.2013.6627021
DO - 10.1109/Transducers.2013.6627021
M3 - Conference contribution
AN - SCOPUS:84891699558
SN - 9781467359818
T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
SP - 1326
EP - 1327
BT - 2013 Transducers and Eurosensors XXVII
T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Y2 - 16 June 2013 through 20 June 2013
ER -