Fabrication of Si nanostructures for single electron device applications by anisotropic etching

Toshiro Hiramoto, Hiroki Ishikuro, Kenichi Saito, Tomoyuki Fujii, Takuya Saraya, Gen Hashiguchi, Toshiaki Ikoma

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy