Fabrication of single-crystal silicon micro pillars on copper foils by nanosecond pulsed laser irradiation

Jiwang Yan, Jun Noguchi, Yoshitake Terashi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A nanosecond pulsed Nd:YAG laser was used to irradiate a mixture of silicon powders, polyimide and carbon black deposited onto a copper foil. Silicon micro pillars with a single-crystalline structure were successfully created through laser-induced material self-organization. The shape, orientation and growth rate of the pillars were controllable by varying the fluence, incident angle and scan speed of the laser. The resulting pillar-on-foil structures were applied as negative electrodes of lithium ion batteries, and excellent electrical capacities as well as charge/discharge cycle characteristics could be obtained. The applicability of the proposed method to the manufacture of three-dimensional microstructures was demonstrated.

Original languageEnglish
JournalCIRP Annals - Manufacturing Technology
DOIs
Publication statusAccepted/In press - 2017

Fingerprint

Laser beam effects
Pulsed lasers
Metal foil
Single crystals
Copper
Fabrication
Silicon
Lasers
Carbon black
Polyimides
Crystalline materials
Powders
Microstructure
Electrodes

Keywords

  • Micro structure
  • Selective laser melting
  • Silicon

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

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abstract = "A nanosecond pulsed Nd:YAG laser was used to irradiate a mixture of silicon powders, polyimide and carbon black deposited onto a copper foil. Silicon micro pillars with a single-crystalline structure were successfully created through laser-induced material self-organization. The shape, orientation and growth rate of the pillars were controllable by varying the fluence, incident angle and scan speed of the laser. The resulting pillar-on-foil structures were applied as negative electrodes of lithium ion batteries, and excellent electrical capacities as well as charge/discharge cycle characteristics could be obtained. The applicability of the proposed method to the manufacture of three-dimensional microstructures was demonstrated.",
keywords = "Micro structure, Selective laser melting, Silicon",
author = "Jiwang Yan and Jun Noguchi and Yoshitake Terashi",
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language = "English",
journal = "CIRP Annals - Manufacturing Technology",
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T1 - Fabrication of single-crystal silicon micro pillars on copper foils by nanosecond pulsed laser irradiation

AU - Yan, Jiwang

AU - Noguchi, Jun

AU - Terashi, Yoshitake

PY - 2017

Y1 - 2017

N2 - A nanosecond pulsed Nd:YAG laser was used to irradiate a mixture of silicon powders, polyimide and carbon black deposited onto a copper foil. Silicon micro pillars with a single-crystalline structure were successfully created through laser-induced material self-organization. The shape, orientation and growth rate of the pillars were controllable by varying the fluence, incident angle and scan speed of the laser. The resulting pillar-on-foil structures were applied as negative electrodes of lithium ion batteries, and excellent electrical capacities as well as charge/discharge cycle characteristics could be obtained. The applicability of the proposed method to the manufacture of three-dimensional microstructures was demonstrated.

AB - A nanosecond pulsed Nd:YAG laser was used to irradiate a mixture of silicon powders, polyimide and carbon black deposited onto a copper foil. Silicon micro pillars with a single-crystalline structure were successfully created through laser-induced material self-organization. The shape, orientation and growth rate of the pillars were controllable by varying the fluence, incident angle and scan speed of the laser. The resulting pillar-on-foil structures were applied as negative electrodes of lithium ion batteries, and excellent electrical capacities as well as charge/discharge cycle characteristics could be obtained. The applicability of the proposed method to the manufacture of three-dimensional microstructures was demonstrated.

KW - Micro structure

KW - Selective laser melting

KW - Silicon

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