Fabrication of single-crystal silicon micro pillars on copper foils by nanosecond pulsed laser irradiation

Jiwang Yan, Jun Noguchi, Yoshitake Terashi

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A nanosecond pulsed Nd:YAG laser was used to irradiate a mixture of silicon powders, polyimide and carbon black deposited onto a copper foil. Silicon micro pillars with a single-crystalline structure were successfully created through laser-induced material self-organization. The shape, orientation and growth rate of the pillars were controllable by varying the fluence, incident angle and scan speed of the laser. The resulting pillar-on-foil structures were applied as negative electrodes of lithium ion batteries, and excellent electrical capacities as well as charge/discharge cycle characteristics could be obtained. The applicability of the proposed method to the manufacture of three-dimensional microstructures was demonstrated.

Original languageEnglish
JournalCIRP Annals - Manufacturing Technology
DOIs
Publication statusAccepted/In press - 2017

Keywords

  • Micro structure
  • Selective laser melting
  • Silicon

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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