Fabrication of thin-film fresnel optics by combining diamond turning and photolithographic processes

Jiwang Yan, Kenta Watanabe, Yutaro Nakagawa

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A novel fabrication process is proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications. This process combines diamond turning technology and photolithographic processes. To prevent thin-film lens substrates from deflection during diamond turning, films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure is generated on the metal thin films by diamond turning, the silicon substrate was then removed selectively by reactive ion etching. Experimental results demonstrated that the proposed hybrid fabrication process achieves submicron form accuracy and nanometer surface roughness.

Original languageEnglish
Pages (from-to)385-390
Number of pages6
JournalInternational Journal of Automation Technology
Volume7
Issue number4
DOIs
Publication statusPublished - 2013 Jul

Keywords

  • Diamond turning
  • Fresnel lens
  • Optical elements
  • Photolithography
  • Ultraprecision cutting

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Fingerprint Dive into the research topics of 'Fabrication of thin-film fresnel optics by combining diamond turning and photolithographic processes'. Together they form a unique fingerprint.

Cite this