Fabrication of thin-film fresnel optics by combining diamond turning and photolithographic processes

Jiwang Yan, Kenta Watanabe, Yutaro Nakagawa

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A novel fabrication process is proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications. This process combines diamond turning technology and photolithographic processes. To prevent thin-film lens substrates from deflection during diamond turning, films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure is generated on the metal thin films by diamond turning, the silicon substrate was then removed selectively by reactive ion etching. Experimental results demonstrated that the proposed hybrid fabrication process achieves submicron form accuracy and nanometer surface roughness.

Original languageEnglish
Pages (from-to)385-390
Number of pages6
JournalInternational Journal of Automation Technology
Volume7
Issue number4
Publication statusPublished - 2013 Jul

Fingerprint

Lenses
Optics
Diamonds
Fabrication
Thin films
Reactive ion etching
Substrates
Metals
Silicon wafers
Plating
Surface roughness
Crystalline materials
X rays
Silicon

Keywords

  • Diamond turning
  • Fresnel lens
  • Optical elements
  • Photolithography
  • Ultraprecision cutting

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

Fabrication of thin-film fresnel optics by combining diamond turning and photolithographic processes. / Yan, Jiwang; Watanabe, Kenta; Nakagawa, Yutaro.

In: International Journal of Automation Technology, Vol. 7, No. 4, 07.2013, p. 385-390.

Research output: Contribution to journalArticle

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