Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques

Jiwang Yan; Kentaro Watanabe; Yutaro Nakagawa

doi:10.1016/j.procir.2012.10.026

Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques

Jiwang Yan, Kentaro Watanabe, Yutaro Nakagawa

Department of Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

Abstract

A novel fabrication process was proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications, which combines MEMS technologies and diamond turning technology. To prevent thin-film lens substrates from deflection during diamond turning, the thin films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure has been generated on the metal thin films by diamond turning, the backside supporting silicon substrate was selectively removed by reactive ion etching. Experimental results demonstrated that submicron level form accuracy and nanometer level surface roughness could be achieved by the proposed hybrid fabrication process.

Original language	English
Pages (from-to)	146-150
Number of pages	5
Journal	Procedia CIRP
Volume	4
DOIs	https://doi.org/10.1016/j.procir.2012.10.026
Publication status	Published - 2012 Jan 1
Event	3rd CIRP Conference on Process Machine Interactions, PMI 2012 - Nagoya, Japan Duration: 2012 Oct 29 → 2012 Oct 30

Keywords

Diamond turning
Fresnel lens
MEMS
Micro structure
Optical elements
Ultraprecision cutting

ASJC Scopus subject areas

Control and Systems Engineering
Industrial and Manufacturing Engineering

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10.1016/j.procir.2012.10.026

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title = "Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques",

abstract = "A novel fabrication process was proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications, which combines MEMS technologies and diamond turning technology. To prevent thin-film lens substrates from deflection during diamond turning, the thin films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure has been generated on the metal thin films by diamond turning, the backside supporting silicon substrate was selectively removed by reactive ion etching. Experimental results demonstrated that submicron level form accuracy and nanometer level surface roughness could be achieved by the proposed hybrid fabrication process.",

keywords = "Diamond turning, Fresnel lens, MEMS, Micro structure, Optical elements, Ultraprecision cutting",

author = "Jiwang Yan and Kentaro Watanabe and Yutaro Nakagawa",

year = "2012",

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doi = "10.1016/j.procir.2012.10.026",

language = "English",

volume = "4",

pages = "146--150",

journal = "Procedia CIRP",

issn = "2212-8271",

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note = "3rd CIRP Conference on Process Machine Interactions, PMI 2012 ; Conference date: 29-10-2012 Through 30-10-2012",

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TY - JOUR

T1 - Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques

AU - Yan, Jiwang

AU - Watanabe, Kentaro

AU - Nakagawa, Yutaro

PY - 2012/1/1

Y1 - 2012/1/1

N2 - A novel fabrication process was proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications, which combines MEMS technologies and diamond turning technology. To prevent thin-film lens substrates from deflection during diamond turning, the thin films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure has been generated on the metal thin films by diamond turning, the backside supporting silicon substrate was selectively removed by reactive ion etching. Experimental results demonstrated that submicron level form accuracy and nanometer level surface roughness could be achieved by the proposed hybrid fabrication process.

AB - A novel fabrication process was proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications, which combines MEMS technologies and diamond turning technology. To prevent thin-film lens substrates from deflection during diamond turning, the thin films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure has been generated on the metal thin films by diamond turning, the backside supporting silicon substrate was selectively removed by reactive ion etching. Experimental results demonstrated that submicron level form accuracy and nanometer level surface roughness could be achieved by the proposed hybrid fabrication process.

KW - Diamond turning

KW - Fresnel lens

KW - MEMS

KW - Micro structure

KW - Optical elements

KW - Ultraprecision cutting

UR - http://www.scopus.com/inward/record.url?scp=84883888800&partnerID=8YFLogxK

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U2 - 10.1016/j.procir.2012.10.026

DO - 10.1016/j.procir.2012.10.026

M3 - Conference article

AN - SCOPUS:84883888800

SN - 2212-8271

VL - 4

SP - 146

EP - 150

JO - Procedia CIRP

JF - Procedia CIRP

T2 - 3rd CIRP Conference on Process Machine Interactions, PMI 2012

Y2 - 29 October 2012 through 30 October 2012

ER -

Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques

Abstract

Keywords

ASJC Scopus subject areas

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