Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques

Jiwang Yan, Kentaro Watanabe, Yutaro Nakagawa

Research output: Contribution to journalConference article

Abstract

A novel fabrication process was proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications, which combines MEMS technologies and diamond turning technology. To prevent thin-film lens substrates from deflection during diamond turning, the thin films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure has been generated on the metal thin films by diamond turning, the backside supporting silicon substrate was selectively removed by reactive ion etching. Experimental results demonstrated that submicron level form accuracy and nanometer level surface roughness could be achieved by the proposed hybrid fabrication process.

Original languageEnglish
Pages (from-to)146-150
Number of pages5
JournalProcedia CIRP
Volume4
DOIs
Publication statusPublished - 2012 Jan 1
Event3rd CIRP Conference on Process Machine Interactions, PMI 2012 - Nagoya, Japan
Duration: 2012 Oct 292012 Oct 30

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Keywords

  • Diamond turning
  • Fresnel lens
  • MEMS
  • Micro structure
  • Optical elements
  • Ultraprecision cutting

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering

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