Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques

Jiwang Yan, Kentaro Watanabe, Yutaro Nakagawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A novel fabrication process was proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications, which combines MEMS technologies and diamond turning technology. To prevent thin-film lens substrates from deflection during diamond turning, the thin films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure has been generated on the metal thin films by diamond turning, the backside supporting silicon substrate was selectively removed by reactive ion etching. Experimental results demonstrated that submicron level form accuracy and nanometer level surface roughness could be achieved by the proposed hybrid fabrication process.

Original languageEnglish
Title of host publicationProcedia CIRP
Pages146-150
Number of pages5
Volume4
DOIs
Publication statusPublished - 2012
Event3rd CIRP Conference on Process Machine Interactions, PMI 2012 - Nagoya, Japan
Duration: 2012 Oct 292012 Oct 30

Other

Other3rd CIRP Conference on Process Machine Interactions, PMI 2012
CountryJapan
CityNagoya
Period12/10/2912/10/30

Fingerprint

MEMS
Optics
Diamonds
Fabrication
Lenses
Thin films
Reactive ion etching
Substrates
Metals
Silicon wafers
Plating
Surface roughness
Crystalline materials
X rays
Silicon

Keywords

  • Diamond turning
  • Fresnel lens
  • MEMS
  • Micro structure
  • Optical elements
  • Ultraprecision cutting

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Control and Systems Engineering

Cite this

Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques. / Yan, Jiwang; Watanabe, Kentaro; Nakagawa, Yutaro.

Procedia CIRP. Vol. 4 2012. p. 146-150.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yan, J, Watanabe, K & Nakagawa, Y 2012, Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques. in Procedia CIRP. vol. 4, pp. 146-150, 3rd CIRP Conference on Process Machine Interactions, PMI 2012, Nagoya, Japan, 12/10/29. https://doi.org/10.1016/j.procir.2012.10.026
Yan, Jiwang ; Watanabe, Kentaro ; Nakagawa, Yutaro. / Fabrication of thin-film Fresnel optics by combining diamond turning and MEMS techniques. Procedia CIRP. Vol. 4 2012. pp. 146-150
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