Fabrication of transparent conductive zinc oxide films by chemical bath deposition using solutions containing Zn<sup>2+</sup>and Al<sup>3+</sup> ions

Takahiro Morita, Shintaro Ueno, Eiji Hosono, Haoshen Zhou, Manabu Hagiwara, Shinobu Fujihara

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Transparent ZnO films were fabricated on glass substrates by a chemical bath deposition method using zinc acetate solutions also containing AlCl<inf>3</inf>. A predominant effect of the Al<sup>3+</sup> addition seemed to be suppression of the growth of ZnO crystals and change of the crystallographic orientation of ZnO films. The c-axis and the a-axis of the ZnO films came to stand parallel and vertical to the substrate, respectively, by increasing the Al<sup>3+</sup> concentration. A post ultraviolet irradiation to the films led to a decrease in the sheet resistance from the order of 10<sup>6</sup> to 10<sup>4</sup> Ω·sq.<sup>-1</sup> without changing the morphology or the crystallinity. This might be related to the photocatalytic effect of ZnO to decompose residual organics in the films and increase the number of carriers. The ZnO film obtained from the solution with 1.0 mol % AlCl<inf>3</inf> showed the lowest sheet resistance of 2.5 × 10<sup>4</sup> Ω·sq.<sup>-1</sup>.

Original languageEnglish
Pages (from-to)329-334
Number of pages6
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Volume123
Issue number1437
DOIs
Publication statusPublished - 2015

Fingerprint

Zinc Oxide
Zinc oxide
zinc oxides
Oxide films
oxide films
baths
Ions
Fabrication
fabrication
ions
Sheet resistance
Zinc Acetate
Substrates
Crystal orientation
acetates
crystallinity
Zinc
zinc
retarding
Irradiation

Keywords

  • Chemical bath deposition
  • Oriented film
  • Transparent conductive oxide
  • Uv irradiation
  • ZnO

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry
  • Chemistry(all)
  • Condensed Matter Physics

Cite this

@article{b279109781b24636b55e7d2ae6b86c78,
title = "Fabrication of transparent conductive zinc oxide films by chemical bath deposition using solutions containing Zn2+and Al3+ ions",
abstract = "Transparent ZnO films were fabricated on glass substrates by a chemical bath deposition method using zinc acetate solutions also containing AlCl3. A predominant effect of the Al3+ addition seemed to be suppression of the growth of ZnO crystals and change of the crystallographic orientation of ZnO films. The c-axis and the a-axis of the ZnO films came to stand parallel and vertical to the substrate, respectively, by increasing the Al3+ concentration. A post ultraviolet irradiation to the films led to a decrease in the sheet resistance from the order of 106 to 104 Ω·sq.-1 without changing the morphology or the crystallinity. This might be related to the photocatalytic effect of ZnO to decompose residual organics in the films and increase the number of carriers. The ZnO film obtained from the solution with 1.0 mol {\%} AlCl3 showed the lowest sheet resistance of 2.5 × 104 Ω·sq.-1.",
keywords = "Chemical bath deposition, Oriented film, Transparent conductive oxide, Uv irradiation, ZnO",
author = "Takahiro Morita and Shintaro Ueno and Eiji Hosono and Haoshen Zhou and Manabu Hagiwara and Shinobu Fujihara",
year = "2015",
doi = "10.2109/jcersj2.123.329",
language = "English",
volume = "123",
pages = "329--334",
journal = "Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan",
issn = "0914-5400",
publisher = "Ceramic Society of Japan/Nippon Seramikkusu Kyokai",
number = "1437",

}

TY - JOUR

T1 - Fabrication of transparent conductive zinc oxide films by chemical bath deposition using solutions containing Zn2+and Al3+ ions

AU - Morita, Takahiro

AU - Ueno, Shintaro

AU - Hosono, Eiji

AU - Zhou, Haoshen

AU - Hagiwara, Manabu

AU - Fujihara, Shinobu

PY - 2015

Y1 - 2015

N2 - Transparent ZnO films were fabricated on glass substrates by a chemical bath deposition method using zinc acetate solutions also containing AlCl3. A predominant effect of the Al3+ addition seemed to be suppression of the growth of ZnO crystals and change of the crystallographic orientation of ZnO films. The c-axis and the a-axis of the ZnO films came to stand parallel and vertical to the substrate, respectively, by increasing the Al3+ concentration. A post ultraviolet irradiation to the films led to a decrease in the sheet resistance from the order of 106 to 104 Ω·sq.-1 without changing the morphology or the crystallinity. This might be related to the photocatalytic effect of ZnO to decompose residual organics in the films and increase the number of carriers. The ZnO film obtained from the solution with 1.0 mol % AlCl3 showed the lowest sheet resistance of 2.5 × 104 Ω·sq.-1.

AB - Transparent ZnO films were fabricated on glass substrates by a chemical bath deposition method using zinc acetate solutions also containing AlCl3. A predominant effect of the Al3+ addition seemed to be suppression of the growth of ZnO crystals and change of the crystallographic orientation of ZnO films. The c-axis and the a-axis of the ZnO films came to stand parallel and vertical to the substrate, respectively, by increasing the Al3+ concentration. A post ultraviolet irradiation to the films led to a decrease in the sheet resistance from the order of 106 to 104 Ω·sq.-1 without changing the morphology or the crystallinity. This might be related to the photocatalytic effect of ZnO to decompose residual organics in the films and increase the number of carriers. The ZnO film obtained from the solution with 1.0 mol % AlCl3 showed the lowest sheet resistance of 2.5 × 104 Ω·sq.-1.

KW - Chemical bath deposition

KW - Oriented film

KW - Transparent conductive oxide

KW - Uv irradiation

KW - ZnO

UR - http://www.scopus.com/inward/record.url?scp=84928923132&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84928923132&partnerID=8YFLogxK

U2 - 10.2109/jcersj2.123.329

DO - 10.2109/jcersj2.123.329

M3 - Article

VL - 123

SP - 329

EP - 334

JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

JF - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

SN - 0914-5400

IS - 1437

ER -