Femtosecond laser ablation processing of x-cut LiNbO3 substrates for optical communication devices

Riichi Kitano, Kazue Ozono, Minoru Obara, Hiroyuki Tsuda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We have studied femtosecond laser ablation characteristics of LiNbO3 for the first time. LiNbO3 is ferroelectric material with large optical nonlinearity and Pockels effect. The femtosecond laser ablation is very useful to fabricate various optical devices including the optical modulator and the tunable optical filter for optical communication systems because the thermal damage around the irradiated area is small due to the short pulse width, and the sub-wavelength structures may be formed by the multi-photon excitation. In our experiments, the femtosecond Ti:Sapphire laser system (Energy 0.14 mJ/pulse, Wavelength 800 nm, Pulse duration 60 fs, Repetition rate 1 kHz) based on the chirped-pulse amplification (CPA) technique was used. The aperture with a diameter of 5 mm was imaged onto the LiNbO3 surface by the objective lens in the air. We observed ablation holes by the scanning electron microscope and the profilometer. We have found no damage around the holes and the clear boundary between ablated area and non-ablated area was observed. Those features are very useful for precise material processing. The bottom face of the holes was relatively flat. The etching rate was 0.93 micrometer/pulse and proportional to the number of the laser pulse. The results showed that the femtosecond laser ablation is an innovative tool for manufacturing LiNbO3-based optical devices.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsA. Pique, K. Sugioka, P.R. Herman, J. Fieret, F.G. Bachmann, J.J. Dubowski, W. Hoving, K. Washio, D.B. Geohegan, F. Trager, K. Murakami
Pages386-393
Number of pages8
Volume4977
DOIs
Publication statusPublished - 2003
EventPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II - San Jose, CA, United States
Duration: 2003 Jan 272003 Jan 30

Other

OtherPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II
CountryUnited States
CitySan Jose, CA
Period03/1/2703/1/30

Fingerprint

Laser ablation
Optical communication
Ultrashort pulses
laser ablation
optical communication
Laser pulses
Optical devices
Substrates
Processing
pulses
Wavelength
pulse duration
Optical filters
Light modulators
Ablation
damage
Sapphire
profilometers
Ferroelectric materials
Amplification

Keywords

  • Ablation
  • Femtosecond laser
  • LiNbO
  • Optical communication
  • Optical waveguide
  • Processing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Kitano, R., Ozono, K., Obara, M., & Tsuda, H. (2003). Femtosecond laser ablation processing of x-cut LiNbO3 substrates for optical communication devices. In A. Pique, K. Sugioka, P. R. Herman, J. Fieret, F. G. Bachmann, J. J. Dubowski, W. Hoving, K. Washio, D. B. Geohegan, F. Trager, ... K. Murakami (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4977, pp. 386-393) https://doi.org/10.1117/12.479245

Femtosecond laser ablation processing of x-cut LiNbO3 substrates for optical communication devices. / Kitano, Riichi; Ozono, Kazue; Obara, Minoru; Tsuda, Hiroyuki.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / A. Pique; K. Sugioka; P.R. Herman; J. Fieret; F.G. Bachmann; J.J. Dubowski; W. Hoving; K. Washio; D.B. Geohegan; F. Trager; K. Murakami. Vol. 4977 2003. p. 386-393.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kitano, R, Ozono, K, Obara, M & Tsuda, H 2003, Femtosecond laser ablation processing of x-cut LiNbO3 substrates for optical communication devices. in A Pique, K Sugioka, PR Herman, J Fieret, FG Bachmann, JJ Dubowski, W Hoving, K Washio, DB Geohegan, F Trager & K Murakami (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4977, pp. 386-393, PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II, San Jose, CA, United States, 03/1/27. https://doi.org/10.1117/12.479245
Kitano R, Ozono K, Obara M, Tsuda H. Femtosecond laser ablation processing of x-cut LiNbO3 substrates for optical communication devices. In Pique A, Sugioka K, Herman PR, Fieret J, Bachmann FG, Dubowski JJ, Hoving W, Washio K, Geohegan DB, Trager F, Murakami K, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4977. 2003. p. 386-393 https://doi.org/10.1117/12.479245
Kitano, Riichi ; Ozono, Kazue ; Obara, Minoru ; Tsuda, Hiroyuki. / Femtosecond laser ablation processing of x-cut LiNbO3 substrates for optical communication devices. Proceedings of SPIE - The International Society for Optical Engineering. editor / A. Pique ; K. Sugioka ; P.R. Herman ; J. Fieret ; F.G. Bachmann ; J.J. Dubowski ; W. Hoving ; K. Washio ; D.B. Geohegan ; F. Trager ; K. Murakami. Vol. 4977 2003. pp. 386-393
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