@inproceedings{cbf8b0d0e1c34df49ecde32a60e297b1,
title = "Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS",
abstract = "We experimentally demonstrated formation of electrically conductive structures by modifying native polydimethylsiloxane (PDMS) with femtosecond laser. By irradiating femtosecond laser pulses to native PDMS, black structures with electrical conductivity were formed. Analyses using X-ray diffraction (XRD) show that the formed structures were composed of β-silicon carbide (β-SiC). Our technique enables the spatially selective formation of β-SiC on the surface of PDMS, leading to open a novel route to develop a simple method to fabricate flexible or stretchable MEMS devices with SiC microstructures.",
keywords = "femtosecond laser, laser direct writing, polydimethylsiloxane, silicon carbide",
author = "Yasutaka Nakajima and Shuichiro Hayashi and Akito Katayama and Nedyalkov, {Nikolay N.} and Mitsuhiro Terakawa",
note = "Funding Information: This study was partially supported by a grant from the Amada Foundation. Y. Nakajima. is grateful for a Grant-in-Aid for Research Fellow of the Japan Society for the Promotion of Science (JSPS). Publisher Copyright: Copyright {\textcopyright} 2019 SPIE.; Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019 ; Conference date: 02-02-2019 Through 05-02-2019",
year = "2019",
doi = "10.1117/12.2506486",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Roberto Osellame and Herman, {Peter R.} and Michel Meunier",
booktitle = "Frontiers in Ultrafast Optics",
}