Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS

Yasutaka Nakajima, Shuichiro Hayashi, Akito Katayama, Nikolay N. Nedyalkov, Mitsuhiro Terakawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We experimentally demonstrated formation of electrically conductive structures by modifying native polydimethylsiloxane (PDMS) with femtosecond laser. By irradiating femtosecond laser pulses to native PDMS, black structures with electrical conductivity were formed. Analyses using X-ray diffraction (XRD) show that the formed structures were composed of β-silicon carbide (β-SiC). Our technique enables the spatially selective formation of β-SiC on the surface of PDMS, leading to open a novel route to develop a simple method to fabricate flexible or stretchable MEMS devices with SiC microstructures.

Original languageEnglish
Title of host publicationFrontiers in Ultrafast Optics
Subtitle of host publicationBiomedical, Scientific, and Industrial Applications XIX
EditorsMichel Meunier, Peter R. Herman, Roberto Osellame
PublisherSPIE
ISBN (Electronic)9781510624580
DOIs
Publication statusPublished - 2019 Jan 1
EventFrontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019 - San Francisco, United States
Duration: 2019 Feb 22019 Feb 5

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10908
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceFrontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019
CountryUnited States
CitySan Francisco
Period19/2/219/2/5

Fingerprint

Femtosecond Laser
Polydimethylsiloxane
Ultrashort pulses
Silicon carbide
silicon carbides
Silicon
microelectromechanical systems
lasers
Femtosecond Laser Pulses
Electrical Conductivity
routes
Micro-electro-mechanical Systems
X-ray Diffraction
microstructure
electrical resistivity
MEMS
Microstructure
pulses
diffraction
X ray diffraction

Keywords

  • femtosecond laser
  • laser direct writing
  • polydimethylsiloxane
  • silicon carbide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Nakajima, Y., Hayashi, S., Katayama, A., Nedyalkov, N. N., & Terakawa, M. (2019). Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS. In M. Meunier, P. R. Herman, & R. Osellame (Eds.), Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX [1090804] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10908). SPIE. https://doi.org/10.1117/12.2506486

Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS. / Nakajima, Yasutaka; Hayashi, Shuichiro; Katayama, Akito; Nedyalkov, Nikolay N.; Terakawa, Mitsuhiro.

Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX. ed. / Michel Meunier; Peter R. Herman; Roberto Osellame. SPIE, 2019. 1090804 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10908).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakajima, Y, Hayashi, S, Katayama, A, Nedyalkov, NN & Terakawa, M 2019, Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS. in M Meunier, PR Herman & R Osellame (eds), Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX., 1090804, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10908, SPIE, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019, San Francisco, United States, 19/2/2. https://doi.org/10.1117/12.2506486
Nakajima Y, Hayashi S, Katayama A, Nedyalkov NN, Terakawa M. Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS. In Meunier M, Herman PR, Osellame R, editors, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX. SPIE. 2019. 1090804. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.2506486
Nakajima, Yasutaka ; Hayashi, Shuichiro ; Katayama, Akito ; Nedyalkov, Nikolay N. ; Terakawa, Mitsuhiro. / Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS. Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX. editor / Michel Meunier ; Peter R. Herman ; Roberto Osellame. SPIE, 2019. (Proceedings of SPIE - The International Society for Optical Engineering).
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