Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS

Yasutaka Nakajima, Shuichiro Hayashi, Akito Katayama, Nikolay N. Nedyalkov, Mitsuhiro Terakawa

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We experimentally demonstrated formation of electrically conductive structures by modifying native polydimethylsiloxane (PDMS) with femtosecond laser. By irradiating femtosecond laser pulses to native PDMS, black structures with electrical conductivity were formed. Analyses using X-ray diffraction (XRD) show that the formed structures were composed of β-silicon carbide (β-SiC). Our technique enables the spatially selective formation of β-SiC on the surface of PDMS, leading to open a novel route to develop a simple method to fabricate flexible or stretchable MEMS devices with SiC microstructures.

    Original languageEnglish
    Title of host publicationFrontiers in Ultrafast Optics
    Subtitle of host publicationBiomedical, Scientific, and Industrial Applications XIX
    EditorsMichel Meunier, Peter R. Herman, Roberto Osellame
    PublisherSPIE
    ISBN (Electronic)9781510624580
    DOIs
    Publication statusPublished - 2019 Jan 1
    EventFrontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019 - San Francisco, United States
    Duration: 2019 Feb 22019 Feb 5

    Publication series

    NameProceedings of SPIE - The International Society for Optical Engineering
    Volume10908
    ISSN (Print)0277-786X
    ISSN (Electronic)1996-756X

    Conference

    ConferenceFrontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019
    CountryUnited States
    CitySan Francisco
    Period19/2/219/2/5

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    Keywords

    • femtosecond laser
    • laser direct writing
    • polydimethylsiloxane
    • silicon carbide

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Computer Science Applications
    • Applied Mathematics
    • Electrical and Electronic Engineering

    Cite this

    Nakajima, Y., Hayashi, S., Katayama, A., Nedyalkov, N. N., & Terakawa, M. (2019). Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS. In M. Meunier, P. R. Herman, & R. Osellame (Eds.), Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX [1090804] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10908). SPIE. https://doi.org/10.1117/12.2506486