Ferroelectric BaTiO3 thin-film technology compatible with LTCC process for integrated RF modules

F. Nakasone, T. Suzuki, K. Kobayashi, K. Kawamura, Y. Mizuno, H. Kishi, H. Chazono, H. Imai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel powder-sintering thin film process using single nanosized particles of sol-gel-derived crystalline BaTiO3 without the sintering additives obtains a highly densified microstructure containing columnar-like grains at lower temperatures of 800°C. The BaTiO3 thin film fabricated on a (lll)-oriented Pt electrode shows high crystallinity, which is desirable for microwave tunable applications, and a relatively high dielectric constant of 635 at 10 kHz with a low loss tangent of 0.007. Furthermore, its two-dimensional reciprocal space map revealed the possibility of the crystallographic orientation control for the nanoparticle-derived BaTiO 3 thin film.

Original languageEnglish
Title of host publicationMaterials Science and Technology Conference and Exhibition MS and T'08
Pages254-261
Number of pages8
Publication statusPublished - 2008 Dec 1
EventMaterials Science and Technology Conference and Exhibition, MS and T'08 - Pittsburgh, PA, United States
Duration: 2008 Oct 52008 Oct 9

Publication series

NameMaterials Science and Technology Conference and Exhibition, MS and T'08
Volume1

Other

OtherMaterials Science and Technology Conference and Exhibition, MS and T'08
CountryUnited States
CityPittsburgh, PA
Period08/10/508/10/9

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Keywords

  • BaTiO3
  • Capacitor
  • Nanoparticle
  • Solid phase epitaxy
  • Thin film

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials

Cite this

Nakasone, F., Suzuki, T., Kobayashi, K., Kawamura, K., Mizuno, Y., Kishi, H., Chazono, H., & Imai, H. (2008). Ferroelectric BaTiO3 thin-film technology compatible with LTCC process for integrated RF modules. In Materials Science and Technology Conference and Exhibition MS and T'08 (pp. 254-261). (Materials Science and Technology Conference and Exhibition, MS and T'08; Vol. 1).