Fiber optic surface topography measurement sensor and its design study

Yue Yang, Kazuo Yamazaki, Hideki Aoyama, Sadayuki Matsumiya

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

This paper presents some aspects of design approach, modeling, and experimental measurement results of a fiber optic-based surface topography measurement sensor that can measure surface roughness as well as the distance between the sensor tip and a surface and surface inclination angles. The working principle of the sensor is based on the detection of light intensity reflecting from the surface being measured. The sensor is very small and easy to operate. It can be attached to a coordinate measuring machine (CMM) to measure surface position coordinates, inclination angles, and surface roughness in a noncontact manner at one measurement setup. A theoretical model of intensity distribution and intensity detection has been established for the sensor. A three-factor and three-level experiment was designed to investigate the relationship between sensor performance and sensor design parameters. Two second-order regression models have been generated, which show that the central distance between the emitting and receiving fibers of a sensor has the strongest influence on the effective range of the sensor; whereas, the critical angle of a receiving fiber influences the sensitivity of the sensor most.

Original languageEnglish
Pages (from-to)32-40
Number of pages9
JournalPrecision Engineering
Volume24
Issue number1
DOIs
Publication statusPublished - 2000 Jan

Fingerprint

Surface topography
Fiber optics
Sensors
Surface roughness
Coordinate measuring machines
Fibers

ASJC Scopus subject areas

  • Engineering(all)
  • Mechanical Engineering

Cite this

Fiber optic surface topography measurement sensor and its design study. / Yang, Yue; Yamazaki, Kazuo; Aoyama, Hideki; Matsumiya, Sadayuki.

In: Precision Engineering, Vol. 24, No. 1, 01.2000, p. 32-40.

Research output: Contribution to journalArticle

Yang, Yue ; Yamazaki, Kazuo ; Aoyama, Hideki ; Matsumiya, Sadayuki. / Fiber optic surface topography measurement sensor and its design study. In: Precision Engineering. 2000 ; Vol. 24, No. 1. pp. 32-40.
@article{4085a25279084e3a821e92da15c7eccc,
title = "Fiber optic surface topography measurement sensor and its design study",
abstract = "This paper presents some aspects of design approach, modeling, and experimental measurement results of a fiber optic-based surface topography measurement sensor that can measure surface roughness as well as the distance between the sensor tip and a surface and surface inclination angles. The working principle of the sensor is based on the detection of light intensity reflecting from the surface being measured. The sensor is very small and easy to operate. It can be attached to a coordinate measuring machine (CMM) to measure surface position coordinates, inclination angles, and surface roughness in a noncontact manner at one measurement setup. A theoretical model of intensity distribution and intensity detection has been established for the sensor. A three-factor and three-level experiment was designed to investigate the relationship between sensor performance and sensor design parameters. Two second-order regression models have been generated, which show that the central distance between the emitting and receiving fibers of a sensor has the strongest influence on the effective range of the sensor; whereas, the critical angle of a receiving fiber influences the sensitivity of the sensor most.",
author = "Yue Yang and Kazuo Yamazaki and Hideki Aoyama and Sadayuki Matsumiya",
year = "2000",
month = "1",
doi = "10.1016/S0141-6359(99)00025-2",
language = "English",
volume = "24",
pages = "32--40",
journal = "Precision Engineering",
issn = "0141-6359",
publisher = "Elsevier Inc.",
number = "1",

}

TY - JOUR

T1 - Fiber optic surface topography measurement sensor and its design study

AU - Yang, Yue

AU - Yamazaki, Kazuo

AU - Aoyama, Hideki

AU - Matsumiya, Sadayuki

PY - 2000/1

Y1 - 2000/1

N2 - This paper presents some aspects of design approach, modeling, and experimental measurement results of a fiber optic-based surface topography measurement sensor that can measure surface roughness as well as the distance between the sensor tip and a surface and surface inclination angles. The working principle of the sensor is based on the detection of light intensity reflecting from the surface being measured. The sensor is very small and easy to operate. It can be attached to a coordinate measuring machine (CMM) to measure surface position coordinates, inclination angles, and surface roughness in a noncontact manner at one measurement setup. A theoretical model of intensity distribution and intensity detection has been established for the sensor. A three-factor and three-level experiment was designed to investigate the relationship between sensor performance and sensor design parameters. Two second-order regression models have been generated, which show that the central distance between the emitting and receiving fibers of a sensor has the strongest influence on the effective range of the sensor; whereas, the critical angle of a receiving fiber influences the sensitivity of the sensor most.

AB - This paper presents some aspects of design approach, modeling, and experimental measurement results of a fiber optic-based surface topography measurement sensor that can measure surface roughness as well as the distance between the sensor tip and a surface and surface inclination angles. The working principle of the sensor is based on the detection of light intensity reflecting from the surface being measured. The sensor is very small and easy to operate. It can be attached to a coordinate measuring machine (CMM) to measure surface position coordinates, inclination angles, and surface roughness in a noncontact manner at one measurement setup. A theoretical model of intensity distribution and intensity detection has been established for the sensor. A three-factor and three-level experiment was designed to investigate the relationship between sensor performance and sensor design parameters. Two second-order regression models have been generated, which show that the central distance between the emitting and receiving fibers of a sensor has the strongest influence on the effective range of the sensor; whereas, the critical angle of a receiving fiber influences the sensitivity of the sensor most.

UR - http://www.scopus.com/inward/record.url?scp=0033740742&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033740742&partnerID=8YFLogxK

U2 - 10.1016/S0141-6359(99)00025-2

DO - 10.1016/S0141-6359(99)00025-2

M3 - Article

VL - 24

SP - 32

EP - 40

JO - Precision Engineering

JF - Precision Engineering

SN - 0141-6359

IS - 1

ER -