Finite element analysis of vertical micro-probe considering Joule-heating effect

Hyun Woo Jung, Seung Jae Kim, Yun Jae Kim, Jung Yup Kim, Joo Yul Lee, Jun Hyub Park

Research output: Contribution to journalArticle

Abstract

This paper describes structural analysis method considering Joule-heating for a reliable design of vertical probe. In this study, the tensile tests were performed to obtain mechanical properties of new material, Nickel-0.2%Boron. Specially, finite element analysis of probe considering Joule-heating effect is performed to analyse internal stress and contact force. To verify the result of finite element analysis, the manufactured probe is tested. The new material, Nickel-0.2% Boron has 95 GPa of the elastic modulus, 2261 MPa of the 0.2% proof strength and 2414 MPa of the tensile strength. First, the accuracy of the FE analysis was verified by comparing the contact force-over-drive (displacement) curves when compressing the probe to 75 μm without applied current between FE analysis and probe test. The temperature of probe by Joule-heating increases as the current is increased and consequently contact force and internal stress is increased by thermal expansion at 75 μm of over-drive. The result of finite element analysis coincides with the result of experiment but there is considerable error between the results over 0.36 A. From the FE analysis, it can be seen that the maximum stress is 360 MPa when there is no applied current and the maximum stress is 409 MPa when the applied current is 0.36 A. From this result, it was found that the applied current causes the reduction of fatigue life and a Curie temperature of Nickel was reached when a current of 0.36 A was applied.

Original languageEnglish
Pages (from-to)96-105
Number of pages10
JournalInternational Journal of Fatigue
Volume101
DOIs
Publication statusPublished - 2017 Aug 1
Externally publishedYes

Fingerprint

Joule Heating
Joule heating
Probe
Vertical
Finite Element
Finite element method
Contact Force
Nickel
Boron
Residual stresses
Internal
Tensile Test
Thermal Expansion
Tensile Strength
Elastic Modulus
Fatigue Life
Structural Analysis
Curie temperature
Structural analysis
Mechanical Properties

Keywords

  • Electroplated Nickel Boron
  • Finite element analysis
  • Joule-heating
  • Probe card
  • Thin film tensile test

ASJC Scopus subject areas

  • Modelling and Simulation
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

Finite element analysis of vertical micro-probe considering Joule-heating effect. / Jung, Hyun Woo; Kim, Seung Jae; Kim, Yun Jae; Kim, Jung Yup; Lee, Joo Yul; Park, Jun Hyub.

In: International Journal of Fatigue, Vol. 101, 01.08.2017, p. 96-105.

Research output: Contribution to journalArticle

Jung, Hyun Woo ; Kim, Seung Jae ; Kim, Yun Jae ; Kim, Jung Yup ; Lee, Joo Yul ; Park, Jun Hyub. / Finite element analysis of vertical micro-probe considering Joule-heating effect. In: International Journal of Fatigue. 2017 ; Vol. 101. pp. 96-105.
@article{d0398efd0eee45c38de2391f3231ba36,
title = "Finite element analysis of vertical micro-probe considering Joule-heating effect",
abstract = "This paper describes structural analysis method considering Joule-heating for a reliable design of vertical probe. In this study, the tensile tests were performed to obtain mechanical properties of new material, Nickel-0.2{\%}Boron. Specially, finite element analysis of probe considering Joule-heating effect is performed to analyse internal stress and contact force. To verify the result of finite element analysis, the manufactured probe is tested. The new material, Nickel-0.2{\%} Boron has 95 GPa of the elastic modulus, 2261 MPa of the 0.2{\%} proof strength and 2414 MPa of the tensile strength. First, the accuracy of the FE analysis was verified by comparing the contact force-over-drive (displacement) curves when compressing the probe to 75 μm without applied current between FE analysis and probe test. The temperature of probe by Joule-heating increases as the current is increased and consequently contact force and internal stress is increased by thermal expansion at 75 μm of over-drive. The result of finite element analysis coincides with the result of experiment but there is considerable error between the results over 0.36 A. From the FE analysis, it can be seen that the maximum stress is 360 MPa when there is no applied current and the maximum stress is 409 MPa when the applied current is 0.36 A. From this result, it was found that the applied current causes the reduction of fatigue life and a Curie temperature of Nickel was reached when a current of 0.36 A was applied.",
keywords = "Electroplated Nickel Boron, Finite element analysis, Joule-heating, Probe card, Thin film tensile test",
author = "Jung, {Hyun Woo} and Kim, {Seung Jae} and Kim, {Yun Jae} and Kim, {Jung Yup} and Lee, {Joo Yul} and Park, {Jun Hyub}",
year = "2017",
month = "8",
day = "1",
doi = "10.1016/j.ijfatigue.2017.02.021",
language = "English",
volume = "101",
pages = "96--105",
journal = "International Journal of Fatigue",
issn = "0142-1123",
publisher = "Elsevier Limited",

}

TY - JOUR

T1 - Finite element analysis of vertical micro-probe considering Joule-heating effect

AU - Jung, Hyun Woo

AU - Kim, Seung Jae

AU - Kim, Yun Jae

AU - Kim, Jung Yup

AU - Lee, Joo Yul

AU - Park, Jun Hyub

PY - 2017/8/1

Y1 - 2017/8/1

N2 - This paper describes structural analysis method considering Joule-heating for a reliable design of vertical probe. In this study, the tensile tests were performed to obtain mechanical properties of new material, Nickel-0.2%Boron. Specially, finite element analysis of probe considering Joule-heating effect is performed to analyse internal stress and contact force. To verify the result of finite element analysis, the manufactured probe is tested. The new material, Nickel-0.2% Boron has 95 GPa of the elastic modulus, 2261 MPa of the 0.2% proof strength and 2414 MPa of the tensile strength. First, the accuracy of the FE analysis was verified by comparing the contact force-over-drive (displacement) curves when compressing the probe to 75 μm without applied current between FE analysis and probe test. The temperature of probe by Joule-heating increases as the current is increased and consequently contact force and internal stress is increased by thermal expansion at 75 μm of over-drive. The result of finite element analysis coincides with the result of experiment but there is considerable error between the results over 0.36 A. From the FE analysis, it can be seen that the maximum stress is 360 MPa when there is no applied current and the maximum stress is 409 MPa when the applied current is 0.36 A. From this result, it was found that the applied current causes the reduction of fatigue life and a Curie temperature of Nickel was reached when a current of 0.36 A was applied.

AB - This paper describes structural analysis method considering Joule-heating for a reliable design of vertical probe. In this study, the tensile tests were performed to obtain mechanical properties of new material, Nickel-0.2%Boron. Specially, finite element analysis of probe considering Joule-heating effect is performed to analyse internal stress and contact force. To verify the result of finite element analysis, the manufactured probe is tested. The new material, Nickel-0.2% Boron has 95 GPa of the elastic modulus, 2261 MPa of the 0.2% proof strength and 2414 MPa of the tensile strength. First, the accuracy of the FE analysis was verified by comparing the contact force-over-drive (displacement) curves when compressing the probe to 75 μm without applied current between FE analysis and probe test. The temperature of probe by Joule-heating increases as the current is increased and consequently contact force and internal stress is increased by thermal expansion at 75 μm of over-drive. The result of finite element analysis coincides with the result of experiment but there is considerable error between the results over 0.36 A. From the FE analysis, it can be seen that the maximum stress is 360 MPa when there is no applied current and the maximum stress is 409 MPa when the applied current is 0.36 A. From this result, it was found that the applied current causes the reduction of fatigue life and a Curie temperature of Nickel was reached when a current of 0.36 A was applied.

KW - Electroplated Nickel Boron

KW - Finite element analysis

KW - Joule-heating

KW - Probe card

KW - Thin film tensile test

UR - http://www.scopus.com/inward/record.url?scp=85014005645&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85014005645&partnerID=8YFLogxK

U2 - 10.1016/j.ijfatigue.2017.02.021

DO - 10.1016/j.ijfatigue.2017.02.021

M3 - Article

AN - SCOPUS:85014005645

VL - 101

SP - 96

EP - 105

JO - International Journal of Fatigue

JF - International Journal of Fatigue

SN - 0142-1123

ER -