Flexible distributed capacitive sensor with encapsulated ferroelectric liquid

Y. Hotta, Y. Zhang, Norihisa Miki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We demonstrate flexible and highly sensitive capacitive sensor arrays that encapsulate DI water as dielectric. DI water, which is a ferroelectric liquid and has a relative dielectric constant of approximately 80, could increase the capacitance of the sensor and enhance the sensitivity while maintaining flexibility of the sensor with electrodes patterned on flexible PDMS substrates. The proposed sensor was microfabricated and demonstrated successfully 40 times greater sensitivity than sensors without DI water. Since DI water is incompressible fluid, it restricted the displacements of the electrodes. We designed a reservoir of DI water where the DI water between the electrodes could escape, which allowed more deformation of the PDMS substrates and successfully augmented the sensitivity of the proposed sensor.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages573-576
Number of pages4
DOIs
Publication statusPublished - 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

Fingerprint

Capacitive sensors
Ferroelectric materials
Water
sensors
Liquids
liquids
water
Sensors
Electrodes
electrodes
sensitivity
incompressible fluids
Sensor arrays
Substrates
escape
flexibility
Permittivity
Capacitance
capacitance
permittivity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Hotta, Y., Zhang, Y., & Miki, N. (2011). Flexible distributed capacitive sensor with encapsulated ferroelectric liquid. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 573-576). [5734489] https://doi.org/10.1109/MEMSYS.2011.5734489

Flexible distributed capacitive sensor with encapsulated ferroelectric liquid. / Hotta, Y.; Zhang, Y.; Miki, Norihisa.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2011. p. 573-576 5734489.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hotta, Y, Zhang, Y & Miki, N 2011, Flexible distributed capacitive sensor with encapsulated ferroelectric liquid. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 5734489, pp. 573-576, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734489
Hotta Y, Zhang Y, Miki N. Flexible distributed capacitive sensor with encapsulated ferroelectric liquid. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2011. p. 573-576. 5734489 https://doi.org/10.1109/MEMSYS.2011.5734489
Hotta, Y. ; Zhang, Y. ; Miki, Norihisa. / Flexible distributed capacitive sensor with encapsulated ferroelectric liquid. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2011. pp. 573-576
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