@inproceedings{10c0d73c07884617af404023feada5d1,
title = "Fluid jet and bonnet polishing of optical moulds for applications from visible to X-Ray",
abstract = "Electroless Nickel (ENi) and binderless Tungsten Carbide (WC) are widely used to make replication moulds for optics ranging from consumer camera lenses to high-accuracy X-ray mirrors. Aspheric shape generation is generally performed by diamond turning in the case of Nickel, and micro-grinding in the case of Tungsten Carbide. Both machining methods fail in general to meet the ultra-precision criteria required by an increasing number of applications. A 7-axis CNC machine equipped with sub-aperture fluid jet and precessed bonnet polishing technology was used to develop deterministic finishing processes on both Electroless Nickel and Tungsten Carbide. Corrective polishing to less than λ/20 (<31nm PV) form error can be achieved, as well as the ability to smooth surface texture down to 1nm Ra or less.",
author = "A. Beaucamp and R. Freeman and A. Matsumoto and Y. Namba",
year = "2011",
language = "English",
series = "Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011",
publisher = "euspen",
pages = "29--32",
editor = "P. Shore and Henny Spaan and Theresa Burke and {Van Brussel}, H.",
booktitle = "Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011",
note = "11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011 ; Conference date: 23-05-2011 Through 26-05-2011",
}