Fluidic-based inclination sensor by silica coating process with low-voltage detection circuitry

Asrulnizam Bin Abd Manaf, Yoshinori Matsumoto

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this paper, we proposed a sealing technique for sealing a glass cap with a ceramic substrate by using silica coating liquid to increase the performance of fluid-based inclination sensor in durability and heat-resisting properties. The diameter of glass cap and height were 4.0 mm and 2.0 mm, respectively. The sensor was developed with one-side-electrode-type structure and propylene carbonate was used as electrolyte. The sensor uses capacitance change to detect the angle of inclination, and it is capable of measuring inclination at the supply voltage of 1.5 V when the sensor is combined with the capacitance detection circuitry. The current consumption of inclination sensor was decreased from 250 μA to 49.3 μA by replacing an operational amplifier to an inverter amplifier in the capacitance detection circuitry. The sensitivity, response time and resolution of sensor were 4 mV/deg, 0.6 s and 1.8°, respectively at supply voltage of 1.5 V. The temperature characteristic of sensor was evaluated between-l0°C to 50°C.

Original languageEnglish
Pages (from-to)210-214
Number of pages5
JournalIEEJ Transactions on Sensors and Micromachines
Volume129
Issue number7
DOIs
Publication statusPublished - 2009

Fingerprint

Fluidics
Silica
Coatings
Sensors
Electric potential
Capacitance
Glass
Operational amplifiers
Heat resistance
Propylene
Carbonates
Durability
Electrolytes
Electrodes
Fluids
Liquids
Substrates

Keywords

  • Capacitance detection circuitry
  • Inclinometer
  • Sand blast
  • Silica coating

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Fluidic-based inclination sensor by silica coating process with low-voltage detection circuitry. / Abd Manaf, Asrulnizam Bin; Matsumoto, Yoshinori.

In: IEEJ Transactions on Sensors and Micromachines, Vol. 129, No. 7, 2009, p. 210-214.

Research output: Contribution to journalArticle

@article{55a36ab2278c45a182e5daacde36ca09,
title = "Fluidic-based inclination sensor by silica coating process with low-voltage detection circuitry",
abstract = "In this paper, we proposed a sealing technique for sealing a glass cap with a ceramic substrate by using silica coating liquid to increase the performance of fluid-based inclination sensor in durability and heat-resisting properties. The diameter of glass cap and height were 4.0 mm and 2.0 mm, respectively. The sensor was developed with one-side-electrode-type structure and propylene carbonate was used as electrolyte. The sensor uses capacitance change to detect the angle of inclination, and it is capable of measuring inclination at the supply voltage of 1.5 V when the sensor is combined with the capacitance detection circuitry. The current consumption of inclination sensor was decreased from 250 μA to 49.3 μA by replacing an operational amplifier to an inverter amplifier in the capacitance detection circuitry. The sensitivity, response time and resolution of sensor were 4 mV/deg, 0.6 s and 1.8°, respectively at supply voltage of 1.5 V. The temperature characteristic of sensor was evaluated between-l0°C to 50°C.",
keywords = "Capacitance detection circuitry, Inclinometer, Sand blast, Silica coating",
author = "{Abd Manaf}, {Asrulnizam Bin} and Yoshinori Matsumoto",
year = "2009",
doi = "10.1541/ieejsmas.129.210",
language = "English",
volume = "129",
pages = "210--214",
journal = "IEEJ Transactions on Sensors and Micromachines",
issn = "1341-8939",
publisher = "The Institute of Electrical Engineers of Japan",
number = "7",

}

TY - JOUR

T1 - Fluidic-based inclination sensor by silica coating process with low-voltage detection circuitry

AU - Abd Manaf, Asrulnizam Bin

AU - Matsumoto, Yoshinori

PY - 2009

Y1 - 2009

N2 - In this paper, we proposed a sealing technique for sealing a glass cap with a ceramic substrate by using silica coating liquid to increase the performance of fluid-based inclination sensor in durability and heat-resisting properties. The diameter of glass cap and height were 4.0 mm and 2.0 mm, respectively. The sensor was developed with one-side-electrode-type structure and propylene carbonate was used as electrolyte. The sensor uses capacitance change to detect the angle of inclination, and it is capable of measuring inclination at the supply voltage of 1.5 V when the sensor is combined with the capacitance detection circuitry. The current consumption of inclination sensor was decreased from 250 μA to 49.3 μA by replacing an operational amplifier to an inverter amplifier in the capacitance detection circuitry. The sensitivity, response time and resolution of sensor were 4 mV/deg, 0.6 s and 1.8°, respectively at supply voltage of 1.5 V. The temperature characteristic of sensor was evaluated between-l0°C to 50°C.

AB - In this paper, we proposed a sealing technique for sealing a glass cap with a ceramic substrate by using silica coating liquid to increase the performance of fluid-based inclination sensor in durability and heat-resisting properties. The diameter of glass cap and height were 4.0 mm and 2.0 mm, respectively. The sensor was developed with one-side-electrode-type structure and propylene carbonate was used as electrolyte. The sensor uses capacitance change to detect the angle of inclination, and it is capable of measuring inclination at the supply voltage of 1.5 V when the sensor is combined with the capacitance detection circuitry. The current consumption of inclination sensor was decreased from 250 μA to 49.3 μA by replacing an operational amplifier to an inverter amplifier in the capacitance detection circuitry. The sensitivity, response time and resolution of sensor were 4 mV/deg, 0.6 s and 1.8°, respectively at supply voltage of 1.5 V. The temperature characteristic of sensor was evaluated between-l0°C to 50°C.

KW - Capacitance detection circuitry

KW - Inclinometer

KW - Sand blast

KW - Silica coating

UR - http://www.scopus.com/inward/record.url?scp=70349285249&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70349285249&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.129.210

DO - 10.1541/ieejsmas.129.210

M3 - Article

AN - SCOPUS:70349285249

VL - 129

SP - 210

EP - 214

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

SN - 1341-8939

IS - 7

ER -