Abstract
In this paper, we proposed a sealing technique for sealing a glass cap with a ceramic substrate by using silica coating liquid to increase the performance of fluid-based inclination sensor in durability and heat-resisting properties. The diameter of glass cap and height were 4.0 mm and 2.0 mm, respectively. The sensor was developed with one-side-electrode-type structure and propylene carbonate was used as electrolyte. The sensor uses capacitance change to detect the angle of inclination, and it is capable of measuring inclination at the supply voltage of 1.5 V when the sensor is combined with the capacitance detection circuitry. The current consumption of inclination sensor was decreased from 250 μA to 49.3 μA by replacing an operational amplifier to an inverter amplifier in the capacitance detection circuitry. The sensitivity, response time and resolution of sensor were 4 mV/deg, 0.6 s and 1.8°, respectively at supply voltage of 1.5 V. The temperature characteristic of sensor was evaluated between-l0°C to 50°C.
| Original language | English |
|---|---|
| Pages (from-to) | 210-214 |
| Number of pages | 5 |
| Journal | IEEJ Transactions on Sensors and Micromachines |
| Volume | 129 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 2009 |
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Keywords
- Capacitance detection circuitry
- Inclinometer
- Sand blast
- Silica coating
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Fluidic-based inclination sensor by silica coating process with low-voltage detection circuitry. / Abd Manaf, Asrulnizam Bin; Matsumoto, Yoshinori.
In: IEEJ Transactions on Sensors and Micromachines, Vol. 129, No. 7, 2009, p. 210-214.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Fluidic-based inclination sensor by silica coating process with low-voltage detection circuitry
AU - Abd Manaf, Asrulnizam Bin
AU - Matsumoto, Yoshinori
PY - 2009
Y1 - 2009
N2 - In this paper, we proposed a sealing technique for sealing a glass cap with a ceramic substrate by using silica coating liquid to increase the performance of fluid-based inclination sensor in durability and heat-resisting properties. The diameter of glass cap and height were 4.0 mm and 2.0 mm, respectively. The sensor was developed with one-side-electrode-type structure and propylene carbonate was used as electrolyte. The sensor uses capacitance change to detect the angle of inclination, and it is capable of measuring inclination at the supply voltage of 1.5 V when the sensor is combined with the capacitance detection circuitry. The current consumption of inclination sensor was decreased from 250 μA to 49.3 μA by replacing an operational amplifier to an inverter amplifier in the capacitance detection circuitry. The sensitivity, response time and resolution of sensor were 4 mV/deg, 0.6 s and 1.8°, respectively at supply voltage of 1.5 V. The temperature characteristic of sensor was evaluated between-l0°C to 50°C.
AB - In this paper, we proposed a sealing technique for sealing a glass cap with a ceramic substrate by using silica coating liquid to increase the performance of fluid-based inclination sensor in durability and heat-resisting properties. The diameter of glass cap and height were 4.0 mm and 2.0 mm, respectively. The sensor was developed with one-side-electrode-type structure and propylene carbonate was used as electrolyte. The sensor uses capacitance change to detect the angle of inclination, and it is capable of measuring inclination at the supply voltage of 1.5 V when the sensor is combined with the capacitance detection circuitry. The current consumption of inclination sensor was decreased from 250 μA to 49.3 μA by replacing an operational amplifier to an inverter amplifier in the capacitance detection circuitry. The sensitivity, response time and resolution of sensor were 4 mV/deg, 0.6 s and 1.8°, respectively at supply voltage of 1.5 V. The temperature characteristic of sensor was evaluated between-l0°C to 50°C.
KW - Capacitance detection circuitry
KW - Inclinometer
KW - Sand blast
KW - Silica coating
UR - http://www.scopus.com/inward/record.url?scp=70349285249&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=70349285249&partnerID=8YFLogxK
U2 - 10.1541/ieejsmas.129.210
DO - 10.1541/ieejsmas.129.210
M3 - Article
AN - SCOPUS:70349285249
VL - 129
SP - 210
EP - 214
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
SN - 1341-8939
IS - 7
ER -