Force controller design based on PQ method for dual-stage actuators in polishing machines

Kenta Seki, Yusaku Shinohara, Makoto Iwasaki, Hiroshi Chinda, Masaki Takahashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a controller design approach to realize a precise force control of load devices in polishing machines. In the load device, a pneumatic actuator and a voice coil motor are combined as dual-stage actuators to expand the servo bandwidth. However, the interference between the dual actuators may deteriorate the servo performance, especially at around the cross-over frequency. In this paper, therefore, PQ method is adopted to achieve the high precision force control by the expansion of servo bandwidth, where the compensators are especially designed to suppress the interference. The proposed approach has been verified by experiments using an actual load device of the polishing machine.

Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society
Pages3388-3393
Number of pages6
DOIs
Publication statusPublished - 2011 Dec 1
Externally publishedYes
Event37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011 - Melbourne, VIC, Australia
Duration: 2011 Nov 72011 Nov 10

Publication series

NameIECON Proceedings (Industrial Electronics Conference)

Other

Other37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011
CountryAustralia
CityMelbourne, VIC
Period11/11/711/11/10

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Force controller design based on PQ method for dual-stage actuators in polishing machines'. Together they form a unique fingerprint.

  • Cite this

    Seki, K., Shinohara, Y., Iwasaki, M., Chinda, H., & Takahashi, M. (2011). Force controller design based on PQ method for dual-stage actuators in polishing machines. In Proceedings: IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society (pp. 3388-3393). [6119856] (IECON Proceedings (Industrial Electronics Conference)). https://doi.org/10.1109/IECON.2011.6119856