Force controller design based on PQ method for dual-stage actuators in polishing machines

Kenta Seki, Yusaku Shinohara, Makoto Iwasaki, Hiroshi Chinda, Masaki Takahashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Force controller design based on PQ method for dual-stage actuators in polishing machines'. Together they form a unique fingerprint.

Engineering & Materials Science