Frequency comb generation in a silicon nitride microring resonator fabricated by using hot-wire CVD method

Shota Sota, Koichiro Handa, Takasumi Tanabe, Yoshinori Uzawa, Kentaro Furusawa, Norihiko Sekine

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report frequency comb generation in a silicon nitride (SiN) based microring resonator fabricated by the hot-wire chemical vapor deposition (HW-CVD) method with an intrinsic quality factor in excess of 5×105,.

Original languageEnglish
Title of host publication2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781957171050
Publication statusPublished - 2022
Event2022 Conference on Lasers and Electro-Optics, CLEO 2022 - San Jose, United States
Duration: 2022 May 152022 May 20

Publication series

Name2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings

Conference

Conference2022 Conference on Lasers and Electro-Optics, CLEO 2022
Country/TerritoryUnited States
CitySan Jose
Period22/5/1522/5/20

ASJC Scopus subject areas

  • Instrumentation
  • Spectroscopy
  • Biomedical Engineering
  • Electrical and Electronic Engineering
  • Management, Monitoring, Policy and Law
  • Materials Science (miscellaneous)
  • Acoustics and Ultrasonics
  • Atomic and Molecular Physics, and Optics

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