TY - JOUR
T1 - Friction and wear properties of CrSiCN coatings with low carbon content as sliding against SiC and steel balls in water
AU - Wu, Zhiwei
AU - Zhou, Fei
AU - Chen, Kangmin
AU - Wang, Qianzhi
AU - Zhou, Zhifeng
AU - Yan, Jiwang
AU - Kwok-Yan Li, Lawrence
N1 - Funding Information:
This work was supported by National Natural Science Foundation of China (Grant no. 51375231 ), The Research Fund for the Doctoral Program of Higher Education (Grant no. 20133218110030 ). A Project Funded by Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD); Funding of Jiangsu Innovation Program for Graduate Education (Grant no. KYLX0234 ) and the Fundamental Research Funds for the Central Universities , We would like to acknowledge them for their financial support.
Publisher Copyright:
© 2015 Elsevier Ltd. All rights reserved.
PY - 2016/2/12
Y1 - 2016/2/12
N2 - CrSiCN coatings were deposited on Si wafer and 316L stainless steels by using unbalanced magnetron sputtering system via adjusting the trimethylsilane (TMS) flows, and their composition, microstructure and nano-hardness were characterized by X-ray diffraction (XRD), X-ray photoelectrons spectroscopy (XPS), scanning electron microscopy (SEM) and nano-indenter, respectively. The friction behaviors sliding against SiC and SUS440C balls in water were investigated. The results showed that the CrSiCN coatings presented nanocomposite microstructure of Cr(C, N) nanocrystallites embedded into amorphous matrix of Si-C-N. The coatings showed maximum hardness (19.1 GPa) deposited at the TMS flow of 10 sccm. Compared with different mating balls, the CrSiCN/SiC tribopairs exhibited better friction and wear properties than that of the CrSiCNS/SUS440C steel tribopairs in water.
AB - CrSiCN coatings were deposited on Si wafer and 316L stainless steels by using unbalanced magnetron sputtering system via adjusting the trimethylsilane (TMS) flows, and their composition, microstructure and nano-hardness were characterized by X-ray diffraction (XRD), X-ray photoelectrons spectroscopy (XPS), scanning electron microscopy (SEM) and nano-indenter, respectively. The friction behaviors sliding against SiC and SUS440C balls in water were investigated. The results showed that the CrSiCN coatings presented nanocomposite microstructure of Cr(C, N) nanocrystallites embedded into amorphous matrix of Si-C-N. The coatings showed maximum hardness (19.1 GPa) deposited at the TMS flow of 10 sccm. Compared with different mating balls, the CrSiCN/SiC tribopairs exhibited better friction and wear properties than that of the CrSiCNS/SUS440C steel tribopairs in water.
KW - CrSiCN coatings
KW - Friction properties
KW - Mechanical properties
KW - Water lubrication
UR - http://www.scopus.com/inward/record.url?scp=84941312476&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84941312476&partnerID=8YFLogxK
U2 - 10.1016/j.triboint.2015.08.032
DO - 10.1016/j.triboint.2015.08.032
M3 - Article
AN - SCOPUS:84941312476
SN - 0301-679X
VL - 94
SP - 176
EP - 186
JO - Tribology International
JF - Tribology International
ER -