Fringe-tunable electrothermal Fresnel mirror for use in compact and high-speed diffusion sensor

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

This paper reports the development of an electrothermal microelectromechanical systems (MEMS) mirror with serpentine shape actuators. A micro Fresnel mirror with fringe-spacing tunability is required to realize a compact and high-speed diffusion sensor for biological samples whose diffusion coefficient changes significantly because of a conformational change. In this case, the measurement time-constant is dependent on the fringe-spacing and diffusion coefficient of the sample. In this study, a fringe-tunable MEMS mirror with an actuation voltage less than 10 V was developed. The characteristics of the fabricated mirror were investigated experimentally. A high-visibility optical interference fringe was successfully demonstrated using both an ultranarrow-linewidth solid-state laser and a low-cost compact laser diode. The experimental results demonstrated a distinct possibility of developing a measurement device using only simple and low-voltage optical components.

Original languageEnglish
Pages (from-to)758-767
Number of pages10
JournalOptics Express
Volume25
Issue number2
DOIs
Publication statusPublished - 2017 Jan 23

Fingerprint

high speed
mirrors
microelectromechanical systems
sensors
diffusion coefficient
spacing
solid state lasers
actuation
visibility
low voltage
time constant
actuators
semiconductor lasers
interference
electric potential
coefficients

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Fringe-tunable electrothermal Fresnel mirror for use in compact and high-speed diffusion sensor. / Kiuchi, Yuki; Taguchi, Yoshihiro; Nagasaka, Yuji.

In: Optics Express, Vol. 25, No. 2, 23.01.2017, p. 758-767.

Research output: Contribution to journalArticle

@article{c1ca8b1888934f42935affdd51ca8f5d,
title = "Fringe-tunable electrothermal Fresnel mirror for use in compact and high-speed diffusion sensor",
abstract = "This paper reports the development of an electrothermal microelectromechanical systems (MEMS) mirror with serpentine shape actuators. A micro Fresnel mirror with fringe-spacing tunability is required to realize a compact and high-speed diffusion sensor for biological samples whose diffusion coefficient changes significantly because of a conformational change. In this case, the measurement time-constant is dependent on the fringe-spacing and diffusion coefficient of the sample. In this study, a fringe-tunable MEMS mirror with an actuation voltage less than 10 V was developed. The characteristics of the fabricated mirror were investigated experimentally. A high-visibility optical interference fringe was successfully demonstrated using both an ultranarrow-linewidth solid-state laser and a low-cost compact laser diode. The experimental results demonstrated a distinct possibility of developing a measurement device using only simple and low-voltage optical components.",
author = "Yuki Kiuchi and Yoshihiro Taguchi and Yuji Nagasaka",
year = "2017",
month = "1",
day = "23",
doi = "10.1364/OE.25.000758",
language = "English",
volume = "25",
pages = "758--767",
journal = "Optics Express",
issn = "1094-4087",
publisher = "The Optical Society",
number = "2",

}

TY - JOUR

T1 - Fringe-tunable electrothermal Fresnel mirror for use in compact and high-speed diffusion sensor

AU - Kiuchi, Yuki

AU - Taguchi, Yoshihiro

AU - Nagasaka, Yuji

PY - 2017/1/23

Y1 - 2017/1/23

N2 - This paper reports the development of an electrothermal microelectromechanical systems (MEMS) mirror with serpentine shape actuators. A micro Fresnel mirror with fringe-spacing tunability is required to realize a compact and high-speed diffusion sensor for biological samples whose diffusion coefficient changes significantly because of a conformational change. In this case, the measurement time-constant is dependent on the fringe-spacing and diffusion coefficient of the sample. In this study, a fringe-tunable MEMS mirror with an actuation voltage less than 10 V was developed. The characteristics of the fabricated mirror were investigated experimentally. A high-visibility optical interference fringe was successfully demonstrated using both an ultranarrow-linewidth solid-state laser and a low-cost compact laser diode. The experimental results demonstrated a distinct possibility of developing a measurement device using only simple and low-voltage optical components.

AB - This paper reports the development of an electrothermal microelectromechanical systems (MEMS) mirror with serpentine shape actuators. A micro Fresnel mirror with fringe-spacing tunability is required to realize a compact and high-speed diffusion sensor for biological samples whose diffusion coefficient changes significantly because of a conformational change. In this case, the measurement time-constant is dependent on the fringe-spacing and diffusion coefficient of the sample. In this study, a fringe-tunable MEMS mirror with an actuation voltage less than 10 V was developed. The characteristics of the fabricated mirror were investigated experimentally. A high-visibility optical interference fringe was successfully demonstrated using both an ultranarrow-linewidth solid-state laser and a low-cost compact laser diode. The experimental results demonstrated a distinct possibility of developing a measurement device using only simple and low-voltage optical components.

UR - http://www.scopus.com/inward/record.url?scp=85010216496&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85010216496&partnerID=8YFLogxK

U2 - 10.1364/OE.25.000758

DO - 10.1364/OE.25.000758

M3 - Article

AN - SCOPUS:85010216496

VL - 25

SP - 758

EP - 767

JO - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 2

ER -