A study was conducted on the inductively coupled plasma characteristics in pure Ar and CF4(5%)/Ar in front of the biased electrode that was 65 mm away from the coil. A set of measurements was performed including the 3D profiles of short lived 2pi state and the metastables towards more nonuniform profiles as pressure increases. As a result, very small effect of the gas flow was observed in the present chamber.
ASJC Scopus subject areas
- Physics and Astronomy(all)