Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics

Ryo Watanabe, Nguyen Minh-Dung, Hidetoshi Takahashi, Tomoyuki Takahata, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

This paper reports on an approach to measure sensitive barometric pressure by fusing a cantilever-based differential pressure sensor (DPS) and a commercially available diaphragm-based absolute pressure sensor (APS). At high frequency, the DPS can detect smaller pressure change than the APS. At low frequency, the APS shows less drift absolute pressure than the DPS. By utilizing the DPS and APS at each advantageous frequency, we propose a highly sensitive and drift-free measurement of barometric pressure.

Original languageEnglish
Article number7050924
Pages (from-to)212-214
Number of pages3
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2015-February
Issue numberFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Externally publishedYes
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

Fingerprint

Pressure sensors
diaphragms
pressure sensors
Diaphragms
Fusion reactions
fusion
differential pressure
atmospheric pressure
low frequencies

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics. / Watanabe, Ryo; Minh-Dung, Nguyen; Takahashi, Hidetoshi; Takahata, Tomoyuki; Matsumoto, Kiyoshi; Shimoyama, Isao.

In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol. 2015-February, No. February, 7050924, 26.02.2015, p. 212-214.

Research output: Contribution to journalConference article

Watanabe, Ryo ; Minh-Dung, Nguyen ; Takahashi, Hidetoshi ; Takahata, Tomoyuki ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics. In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2015 ; Vol. 2015-February, No. February. pp. 212-214.
@article{b80c8100640d4ea0af4723ec26ee2341,
title = "Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics",
abstract = "This paper reports on an approach to measure sensitive barometric pressure by fusing a cantilever-based differential pressure sensor (DPS) and a commercially available diaphragm-based absolute pressure sensor (APS). At high frequency, the DPS can detect smaller pressure change than the APS. At low frequency, the APS shows less drift absolute pressure than the DPS. By utilizing the DPS and APS at each advantageous frequency, we propose a highly sensitive and drift-free measurement of barometric pressure.",
author = "Ryo Watanabe and Nguyen Minh-Dung and Hidetoshi Takahashi and Tomoyuki Takahata and Kiyoshi Matsumoto and Isao Shimoyama",
year = "2015",
month = "2",
day = "26",
doi = "10.1109/MEMSYS.2015.7050924",
language = "English",
volume = "2015-February",
pages = "212--214",
journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
issn = "1084-6999",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "February",

}

TY - JOUR

T1 - Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics

AU - Watanabe, Ryo

AU - Minh-Dung, Nguyen

AU - Takahashi, Hidetoshi

AU - Takahata, Tomoyuki

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2015/2/26

Y1 - 2015/2/26

N2 - This paper reports on an approach to measure sensitive barometric pressure by fusing a cantilever-based differential pressure sensor (DPS) and a commercially available diaphragm-based absolute pressure sensor (APS). At high frequency, the DPS can detect smaller pressure change than the APS. At low frequency, the APS shows less drift absolute pressure than the DPS. By utilizing the DPS and APS at each advantageous frequency, we propose a highly sensitive and drift-free measurement of barometric pressure.

AB - This paper reports on an approach to measure sensitive barometric pressure by fusing a cantilever-based differential pressure sensor (DPS) and a commercially available diaphragm-based absolute pressure sensor (APS). At high frequency, the DPS can detect smaller pressure change than the APS. At low frequency, the APS shows less drift absolute pressure than the DPS. By utilizing the DPS and APS at each advantageous frequency, we propose a highly sensitive and drift-free measurement of barometric pressure.

UR - http://www.scopus.com/inward/record.url?scp=84931065308&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84931065308&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2015.7050924

DO - 10.1109/MEMSYS.2015.7050924

M3 - Conference article

VL - 2015-February

SP - 212

EP - 214

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SN - 1084-6999

IS - February

M1 - 7050924

ER -