Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics

Ryo Watanabe, Nguyen Minh-Dung, Hidetoshi Takahashi, Tomoyuki Takahata, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

This paper reports on an approach to measure sensitive barometric pressure by fusing a cantilever-based differential pressure sensor (DPS) and a commercially available diaphragm-based absolute pressure sensor (APS). At high frequency, the DPS can detect smaller pressure change than the APS. At low frequency, the APS shows less drift absolute pressure than the DPS. By utilizing the DPS and APS at each advantageous frequency, we propose a highly sensitive and drift-free measurement of barometric pressure.

Original languageEnglish
Article number7050924
Pages (from-to)212-214
Number of pages3
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2015-February
Issue numberFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Externally publishedYes
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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