TY - JOUR
T1 - Gas barrier properties of diamond-like carbon films synthesized by using remote type microwave plasma CVD under sub-ambient atmospheric pressure
AU - Tachimoto, Y.
AU - Noborisaka, M.
AU - Shirakura, A.
AU - Kuroyanagi, C.
AU - Suzuki, T.
PY - 2013
Y1 - 2013
N2 - Diamond-like carbon (DLC) films were synthesized on polyethylene (PE) substrates with a remote type microwave plasma chemical vapor deposition (MPCVD) apparatus at 10 kPa. We investigated the effect of source gas flow rate and microwave power on oxygen transmission rate of DLC films. Acetylene (C 2H2) and argon (Ar) gas were used for source gas and carrier gas, respectively. From the result of contact-type profiler and atomic force microscope, oxygen transmission rate decreased as thickness increased and surface roughness decreased with increasing C2H2 flow rate. The oxygen transmission rate of DLC film synthesized at the C 2H2 flow rate of 0.50 l/min and the microwave power of 1.0 kW on 300 μm thick PE substrates was 141 cc/m2·day, while that of uncoated PE substrates was 247 cc/m2·day.
AB - Diamond-like carbon (DLC) films were synthesized on polyethylene (PE) substrates with a remote type microwave plasma chemical vapor deposition (MPCVD) apparatus at 10 kPa. We investigated the effect of source gas flow rate and microwave power on oxygen transmission rate of DLC films. Acetylene (C 2H2) and argon (Ar) gas were used for source gas and carrier gas, respectively. From the result of contact-type profiler and atomic force microscope, oxygen transmission rate decreased as thickness increased and surface roughness decreased with increasing C2H2 flow rate. The oxygen transmission rate of DLC film synthesized at the C 2H2 flow rate of 0.50 l/min and the microwave power of 1.0 kW on 300 μm thick PE substrates was 141 cc/m2·day, while that of uncoated PE substrates was 247 cc/m2·day.
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U2 - 10.1088/1742-6596/417/1/012043
DO - 10.1088/1742-6596/417/1/012043
M3 - Conference article
AN - SCOPUS:84875898738
SN - 1742-6588
VL - 417
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012043
T2 - 15th International Conference on Thin Films, ICTF 2011
Y2 - 8 November 2011 through 11 November 2011
ER -