Gas barrier properties of diamond-like carbon films synthesized by using remote type microwave plasma CVD under sub-ambient atmospheric pressure

Y. Tachimoto, M. Noborisaka, A. Shirakura, C. Kuroyanagi, T. Suzuki

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Gas barrier properties of diamond-like carbon films synthesized by using remote type microwave plasma CVD under sub-ambient atmospheric pressure'. Together they form a unique fingerprint.

Physics & Astronomy