Fingerprint
Dive into the research topics of 'Generation of excess Si species at Si/SiO2 interface and their diffusion into Si/O2 during Si thermal oxidation'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Generation of excess Si species at Si/SiO2 interface and their diffusion into Si/O2 during Si thermal oxidation
Kenzo Ibano, Kohei M. Itoh, Masashi Uematsu
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)