Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F2 neutral gas

F. Sato, Y. Sunada, S. Okamoto, Fumihiko Kannari

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Experiments are described in which ultralong pulse fluorescence of ArF excimer molecules at 193 nm have been produced by dynamically mixing a pulsed Ar/F2 neutral gas into an elecrically excited pulse He jet. Though this sceme does not possess the cooling of internal degrees of freedom that are offered by a supersonic jet, the plasma electrons are more efficiently cooled during contact cooling with neutral gases than in the free jet expansion. Concurrently the medium pressure can be kept high downstream of the He jet. The experiments used a collisional energy transfer method where the discharge power was first deposited in the He gas and then transferred to the Ar/F2 gas. The authors confirmed energy transfer from the He plasma to the Ar gas during the downstream collision by measuring the fluorescence of rare-gas atomic lines in the visible spectrum. The ArF fluorescence intensity gradually increased and became longer as the fraction of F2 in the Ar/F2 gas flow was increased from 10% to 25%. It depended less on the He backing pressure for the range 2-5 atm. This mixture demonstrated an amplification gain in a preliminary experiment with an ArF probe laser.

Original languageEnglish
Pages (from-to)1378-1380
Number of pages3
JournalApplied Physics Letters
Volume61
Issue number12
DOIs
Publication statusPublished - 1992 Jan 1

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neutral gases
plasma jets
fluorescence
pulses
energy transfer
gases
cooling
free jets
backups
excimers
electron plasma
visible spectrum
gas flow
rare gases
degrees of freedom
collisions
expansion
probes
lasers
molecules

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F2 neutral gas. / Sato, F.; Sunada, Y.; Okamoto, S.; Kannari, Fumihiko.

In: Applied Physics Letters, Vol. 61, No. 12, 01.01.1992, p. 1378-1380.

Research output: Contribution to journalArticle

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abstract = "Experiments are described in which ultralong pulse fluorescence of ArF excimer molecules at 193 nm have been produced by dynamically mixing a pulsed Ar/F2 neutral gas into an elecrically excited pulse He jet. Though this sceme does not possess the cooling of internal degrees of freedom that are offered by a supersonic jet, the plasma electrons are more efficiently cooled during contact cooling with neutral gases than in the free jet expansion. Concurrently the medium pressure can be kept high downstream of the He jet. The experiments used a collisional energy transfer method where the discharge power was first deposited in the He gas and then transferred to the Ar/F2 gas. The authors confirmed energy transfer from the He plasma to the Ar gas during the downstream collision by measuring the fluorescence of rare-gas atomic lines in the visible spectrum. The ArF fluorescence intensity gradually increased and became longer as the fraction of F2 in the Ar/F2 gas flow was increased from 10{\%} to 25{\%}. It depended less on the He backing pressure for the range 2-5 atm. This mixture demonstrated an amplification gain in a preliminary experiment with an ArF probe laser.",
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AB - Experiments are described in which ultralong pulse fluorescence of ArF excimer molecules at 193 nm have been produced by dynamically mixing a pulsed Ar/F2 neutral gas into an elecrically excited pulse He jet. Though this sceme does not possess the cooling of internal degrees of freedom that are offered by a supersonic jet, the plasma electrons are more efficiently cooled during contact cooling with neutral gases than in the free jet expansion. Concurrently the medium pressure can be kept high downstream of the He jet. The experiments used a collisional energy transfer method where the discharge power was first deposited in the He gas and then transferred to the Ar/F2 gas. The authors confirmed energy transfer from the He plasma to the Ar gas during the downstream collision by measuring the fluorescence of rare-gas atomic lines in the visible spectrum. The ArF fluorescence intensity gradually increased and became longer as the fraction of F2 in the Ar/F2 gas flow was increased from 10% to 25%. It depended less on the He backing pressure for the range 2-5 atm. This mixture demonstrated an amplification gain in a preliminary experiment with an ArF probe laser.

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