Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F2 neutral gas

F. Sato, Y. Sunada, S. Okamoto, F. Kannari

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F<sub>2</sub> neutral gas'. Together they form a unique fingerprint.

Physics & Astronomy