Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application

Takuya Fujii, Takeru Okada, Mohd Erman Syazwan, Taiga Isoda, Hirotaka Endo, Mohammad Maksudur Rahman, Kohei Ito, Seiji Samukawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

A high density uniform 10 nm amorphous Ge nanodisk structure could be successfully fabricated by a combination of a bio-template to fabricate a high density etching mask of 7 × 1011cm-2 and a neutral beam top-down process. Center-to-center distance of each ferritin was estimated at 13 nm. The fabricated Ge nanostructure showed increasing band gap energy from 1.5 eV up to 1.9 eV when the thickness of the nanostructure was decreased from 8 nm to 2 nm. The fabricated high density germanium nanostructure is expected to be used in many quantum effect devices such as quantum dot solar cells.

Original languageEnglish
Title of host publication2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1033-1036
Number of pages4
ISBN (Electronic)9781479943982
DOIs
Publication statusPublished - 2014 Oct 15
Event40th IEEE Photovoltaic Specialist Conference, PVSC 2014 - Denver, United States
Duration: 2014 Jun 82014 Jun 13

Publication series

Name2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014

Other

Other40th IEEE Photovoltaic Specialist Conference, PVSC 2014
CountryUnited States
CityDenver
Period14/6/814/6/13

Keywords

  • bio template
  • germanium nano disk
  • neutral beam etching
  • quantum dots. intermediate solar cell

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Fujii, T., Okada, T., Syazwan, M. E., Isoda, T., Endo, H., Rahman, M. M., Ito, K., & Samukawa, S. (2014). Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application. In 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014 (pp. 1033-1036). [6925090] (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2014.6925090