Graphene for VLSI: FET and interconnect applications

Yuji Awano

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    26 Citations (Scopus)

    Abstract

    Because of their remarkable physical properties, graphene should be one of the most important Emerging Research Materials (ERM) for not only the front-end but also back-end devices of VLSIs for the next decade. In this paper, we discuss the present status of their material technologies and some issues to be addressed for realizing graphene channels and wiring devices for a future LSI.

    Original languageEnglish
    Title of host publication2009 International Electron Devices Meeting, IEDM 2009 - Technical Digest
    Pages10.1.1-10.1.4
    DOIs
    Publication statusPublished - 2009 Dec 1
    Event2009 International Electron Devices Meeting, IEDM 2009 - Baltimore, MD, United States
    Duration: 2009 Dec 72009 Dec 9

    Publication series

    NameTechnical Digest - International Electron Devices Meeting, IEDM
    ISSN (Print)0163-1918

    Other

    Other2009 International Electron Devices Meeting, IEDM 2009
    CountryUnited States
    CityBaltimore, MD
    Period09/12/709/12/9

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering
    • Materials Chemistry

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  • Cite this

    Awano, Y. (2009). Graphene for VLSI: FET and interconnect applications. In 2009 International Electron Devices Meeting, IEDM 2009 - Technical Digest (pp. 10.1.1-10.1.4). [5424381] (Technical Digest - International Electron Devices Meeting, IEDM). https://doi.org/10.1109/IEDM.2009.5424381