Graphene for VLSI

FET and interconnect applications

Research output: Chapter in Book/Report/Conference proceedingConference contribution

25 Citations (Scopus)

Abstract

Because of their remarkable physical properties, graphene should be one of the most important Emerging Research Materials (ERM) for not only the front-end but also back-end devices of VLSIs for the next decade. In this paper, we discuss the present status of their material technologies and some issues to be addressed for realizing graphene channels and wiring devices for a future LSI.

Original languageEnglish
Title of host publicationTechnical Digest - International Electron Devices Meeting, IEDM
DOIs
Publication statusPublished - 2009
Event2009 International Electron Devices Meeting, IEDM 2009 - Baltimore, MD, United States
Duration: 2009 Dec 72009 Dec 9

Other

Other2009 International Electron Devices Meeting, IEDM 2009
CountryUnited States
CityBaltimore, MD
Period09/12/709/12/9

Fingerprint

Graphite
very large scale integration
Field effect transistors
Graphene
graphene
field effect transistors
large scale integration
wiring
Electric wiring
emerging
Physical properties
physical properties

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry

Cite this

Awano, Y. (2009). Graphene for VLSI: FET and interconnect applications. In Technical Digest - International Electron Devices Meeting, IEDM [5424381] https://doi.org/10.1109/IEDM.2009.5424381

Graphene for VLSI : FET and interconnect applications. / Awano, Yuji.

Technical Digest - International Electron Devices Meeting, IEDM. 2009. 5424381.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Awano, Y 2009, Graphene for VLSI: FET and interconnect applications. in Technical Digest - International Electron Devices Meeting, IEDM., 5424381, 2009 International Electron Devices Meeting, IEDM 2009, Baltimore, MD, United States, 09/12/7. https://doi.org/10.1109/IEDM.2009.5424381
Awano Y. Graphene for VLSI: FET and interconnect applications. In Technical Digest - International Electron Devices Meeting, IEDM. 2009. 5424381 https://doi.org/10.1109/IEDM.2009.5424381
Awano, Yuji. / Graphene for VLSI : FET and interconnect applications. Technical Digest - International Electron Devices Meeting, IEDM. 2009.
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