Growth and optical characterization of dense arrays of site-controlled quantum dots grown in inverted pyramids

Shinichi Watanabe, E. Pelucchi, B. Dwir, M. Baier, K. Leifer, E. Kapon

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We report on the growth and optical properties of dense arrays of single GaAs/AlGaAs quantum dot (QD) heterostructures with pitches as small as 300 nm. The samples were grown by organometallic chemical vapor deposition in dense inverted pyramids on {1 1 1}B GaAs substrate pre-patterned using electron beam lithography and wet chemical etching. The growth conditions such as deoxidation and growth temperatures, growth rates, and V/III ratio, had to be chosen quite differently from those employed with micron-size pyramids. Low-temperature micro-photoluminescence and cathodoluminescence spectra of the samples show distinct luminescence from the QDs with a linewidth of less than 1 meV and uniform emission energy for an ensemble of 900 QDs. The possibility of incorporating such QD arrays inside optical microcavity structures is also discussed.

Original languageEnglish
Pages (from-to)193-198
Number of pages6
JournalPhysica E: Low-Dimensional Systems and Nanostructures
Volume21
Issue number2-4
DOIs
Publication statusPublished - 2004 Mar
Externally publishedYes

Fingerprint

pyramids
Semiconductor quantum dots
quantum dots
Cathodoluminescence
Microcavities
Electron beam lithography
Wet etching
Growth temperature
Organometallics
Linewidth
Heterojunctions
Luminescence
Chemical vapor deposition
Photoluminescence
Optical properties
Substrates
cathodoluminescence
aluminum gallium arsenides
lithography
etching

Keywords

  • Cathodoluminescence
  • Micro-photoluminescence
  • Quantum dot
  • Site-controlled

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Growth and optical characterization of dense arrays of site-controlled quantum dots grown in inverted pyramids. / Watanabe, Shinichi; Pelucchi, E.; Dwir, B.; Baier, M.; Leifer, K.; Kapon, E.

In: Physica E: Low-Dimensional Systems and Nanostructures, Vol. 21, No. 2-4, 03.2004, p. 193-198.

Research output: Contribution to journalArticle

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