Growth process of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD using nitrogen and helium as a dilution gas

Takanori Mori, Takachika Sakurai, Taiki Sato, Akira Shirakura, Tetsuya Suzuki

Research output: Contribution to journalArticle

5 Citations (Scopus)

Fingerprint Dive into the research topics of 'Growth process of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD using nitrogen and helium as a dilution gas'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy