Heat treatment effects on mechanical properties of Ni–Co alloy thin films

S. J. Kim, H. W. Jung, M. W. Lee, Y. J. Kim, Y. H. Huh, J. H. Park

Research output: Contribution to journalArticlepeer-review

Abstract

Vertical type probe is made by microelectromechanical system (MEMS) process in microscale for high degree of integration and performance. To design reliable probe before manufacturing, mechanical properties in microscale is needed. Also, manufactured probe is heat-treated to release residual stress. In this paper, to understand mechanical properties and heat treatment effect in microscale, tensile tests for Ni–Co alloy thin film is performed using specimen with heat-treated under air. The Ni–Co thin film has some enhanced mechanical properties by heat effect and becomes brittle. The changes of grain size distribution and grain direction are observed through electron back-scattered diffraction (EBSD).

Original languageEnglish
Pages (from-to)1589-1595
Number of pages7
JournalMechanics of Advanced Materials and Structures
Volume26
Issue number19
DOIs
Publication statusPublished - 2019
Externally publishedYes

Keywords

  • Ni–Co thin film
  • heat treatment effect
  • mechanical property
  • microscale tensile test
  • probe

ASJC Scopus subject areas

  • Civil and Structural Engineering
  • Mathematics(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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