High cleanliness of portable clean-unit-box to unite clean-unit system platforms (CUSPs) and CUSP units

Md D. Rahaman; K. Gomita; N. Kawaguchi; H. Kaiju; K. Kondo; A. Ishibashi

doi:10.1049/el:20072096

High cleanliness of portable clean-unit-box to unite clean-unit system platforms (CUSPs) and CUSP units

Md D. Rahaman, K. Gomita, N. Kawaguchi, H. Kaiju, K. Kondo, A. Ishibashi

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

As a platform for nano-science and technology, cleanliness in a compact and local clean environment, i.e. a portable clean-unit-box (CUP), is reported for establishing a large-scale network of an ultra-high clean environment platform towards cross-disciplinary research. Analyses of experimental results indicate that the CUP has cleanliness of ISO class ∼2, which is one order of magnitude better than the conventional wafer transportation cleanbox.

Original language	English
Pages (from-to)	1356-1357
Number of pages	2
Journal	Electronics Letters
Volume	43
Issue number	24
DOIs	https://doi.org/10.1049/el:20072096
Publication status	Published - 2007 Nov 30
Externally published	Yes

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1049/el:20072096

Cite this

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AU - Gomita, K.

AU - Kawaguchi, N.

AU - Kaiju, H.

AU - Kondo, K.

AU - Ishibashi, A.

PY - 2007/11/30

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