Abstract
As a platform for nano-science and technology, cleanliness in a compact and local clean environment, i.e. a portable clean-unit-box (CUP), is reported for establishing a large-scale network of an ultra-high clean environment platform towards cross-disciplinary research. Analyses of experimental results indicate that the CUP has cleanliness of ISO class ∼2, which is one order of magnitude better than the conventional wafer transportation cleanbox.
| Original language | English |
|---|---|
| Pages (from-to) | 1356-1357 |
| Number of pages | 2 |
| Journal | Electronics Letters |
| Volume | 43 |
| Issue number | 24 |
| DOIs | |
| Publication status | Published - 2007 Nov 30 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
High cleanliness of portable clean-unit-box to unite clean-unit system platforms (CUSPs) and CUSP units. / Rahaman, Md D.; Gomita, K.; Kawaguchi, N.; Kaiju, Hideo; Kondo, K.; Ishibashi, A.
In: Electronics Letters, Vol. 43, No. 24, 30.11.2007, p. 1356-1357.Research output: Contribution to journal › Article
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TY - JOUR
T1 - High cleanliness of portable clean-unit-box to unite clean-unit system platforms (CUSPs) and CUSP units
AU - Rahaman, Md D.
AU - Gomita, K.
AU - Kawaguchi, N.
AU - Kaiju, Hideo
AU - Kondo, K.
AU - Ishibashi, A.
PY - 2007/11/30
Y1 - 2007/11/30
N2 - As a platform for nano-science and technology, cleanliness in a compact and local clean environment, i.e. a portable clean-unit-box (CUP), is reported for establishing a large-scale network of an ultra-high clean environment platform towards cross-disciplinary research. Analyses of experimental results indicate that the CUP has cleanliness of ISO class ∼2, which is one order of magnitude better than the conventional wafer transportation cleanbox.
AB - As a platform for nano-science and technology, cleanliness in a compact and local clean environment, i.e. a portable clean-unit-box (CUP), is reported for establishing a large-scale network of an ultra-high clean environment platform towards cross-disciplinary research. Analyses of experimental results indicate that the CUP has cleanliness of ISO class ∼2, which is one order of magnitude better than the conventional wafer transportation cleanbox.
UR - http://www.scopus.com/inward/record.url?scp=36448963159&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=36448963159&partnerID=8YFLogxK
U2 - 10.1049/el:20072096
DO - 10.1049/el:20072096
M3 - Article
AN - SCOPUS:36448963159
VL - 43
SP - 1356
EP - 1357
JO - Electronics Letters
JF - Electronics Letters
SN - 0013-5194
IS - 24
ER -