High cleanliness of portable clean-unit-box to unite clean-unit system platforms (CUSPs) and CUSP units

Md D. Rahaman, K. Gomita, N. Kawaguchi, H. Kaiju, K. Kondo, A. Ishibashi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

As a platform for nano-science and technology, cleanliness in a compact and local clean environment, i.e. a portable clean-unit-box (CUP), is reported for establishing a large-scale network of an ultra-high clean environment platform towards cross-disciplinary research. Analyses of experimental results indicate that the CUP has cleanliness of ISO class ∼2, which is one order of magnitude better than the conventional wafer transportation cleanbox.

Original languageEnglish
Pages (from-to)1356-1357
Number of pages2
JournalElectronics Letters
Volume43
Issue number24
DOIs
Publication statusPublished - 2007 Nov 30
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this