Abstract
As a platform for nano-science and technology, cleanliness in a compact and local clean environment, i.e. a portable clean-unit-box (CUP), is reported for establishing a large-scale network of an ultra-high clean environment platform towards cross-disciplinary research. Analyses of experimental results indicate that the CUP has cleanliness of ISO class ∼2, which is one order of magnitude better than the conventional wafer transportation cleanbox.
Original language | English |
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Pages (from-to) | 1356-1357 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 43 |
Issue number | 24 |
DOIs | |
Publication status | Published - 2007 Nov 30 |
Externally published | Yes |
ASJC Scopus subject areas
- Electrical and Electronic Engineering