High-contrast imaging of nano-channels using reflection near-field scanning optical microscope enhanced by optical interference

Masaru Sakai; Shuji Mononobe; Shusaku Akiba; Akifumi Matsuda; Wakana Hara; Mamoru Yoshimoto; Toshiharu Saiki

doi:10.1007/s10043-006-0266-4

High-contrast imaging of nano-channels using reflection near-field scanning optical microscope enhanced by optical interference

Masaru Sakai, Shuji Mononobe, Shusaku Akiba, Akifumi Matsuda, Wakana Hara, Mamoru Yoshimoto, Toshiharu Saiki

Department of Electronics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We demonstrated a contrast enhancement in a near-field scanning optical microscope (NSOM) by optical interference with an aperture probe in reflection (illumination-collection) mode operation. We observed a NiO film deposited on a sapphire substrate and clearly visualized 2-nm-deep nano-channel structures on the surface of the film. The reflection NSOM enhanced by optical interference is quite a promising instrument for high-resolution optical detection and estimation of low-contrast nanostructures.

Original language	English
Pages (from-to)	266-268
Number of pages	3
Journal	Optical Review
Volume	13
Issue number	4
DOIs	https://doi.org/10.1007/s10043-006-0266-4
Publication status	Published - 2006 Jul

Keywords

Aperture probe
High contrast imaging
High resolution imaging
Illumination-collection mode
Nano-channel
Near-field scanning optical microscope
Optical interference

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1007/s10043-006-0266-4

Cite this

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title = "High-contrast imaging of nano-channels using reflection near-field scanning optical microscope enhanced by optical interference",

abstract = "We demonstrated a contrast enhancement in a near-field scanning optical microscope (NSOM) by optical interference with an aperture probe in reflection (illumination-collection) mode operation. We observed a NiO film deposited on a sapphire substrate and clearly visualized 2-nm-deep nano-channel structures on the surface of the film. The reflection NSOM enhanced by optical interference is quite a promising instrument for high-resolution optical detection and estimation of low-contrast nanostructures.",

keywords = "Aperture probe, High contrast imaging, High resolution imaging, Illumination-collection mode, Nano-channel, Near-field scanning optical microscope, Optical interference",

author = "Masaru Sakai and Shuji Mononobe and Shusaku Akiba and Akifumi Matsuda and Wakana Hara and Mamoru Yoshimoto and Toshiharu Saiki",

year = "2006",

month = jul,

doi = "10.1007/s10043-006-0266-4",

language = "English",

volume = "13",

pages = "266--268",

journal = "Optical Review",

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TY - JOUR

T1 - High-contrast imaging of nano-channels using reflection near-field scanning optical microscope enhanced by optical interference

AU - Sakai, Masaru

AU - Mononobe, Shuji

AU - Akiba, Shusaku

AU - Matsuda, Akifumi

AU - Hara, Wakana

AU - Yoshimoto, Mamoru

AU - Saiki, Toshiharu

PY - 2006/7

Y1 - 2006/7

N2 - We demonstrated a contrast enhancement in a near-field scanning optical microscope (NSOM) by optical interference with an aperture probe in reflection (illumination-collection) mode operation. We observed a NiO film deposited on a sapphire substrate and clearly visualized 2-nm-deep nano-channel structures on the surface of the film. The reflection NSOM enhanced by optical interference is quite a promising instrument for high-resolution optical detection and estimation of low-contrast nanostructures.

AB - We demonstrated a contrast enhancement in a near-field scanning optical microscope (NSOM) by optical interference with an aperture probe in reflection (illumination-collection) mode operation. We observed a NiO film deposited on a sapphire substrate and clearly visualized 2-nm-deep nano-channel structures on the surface of the film. The reflection NSOM enhanced by optical interference is quite a promising instrument for high-resolution optical detection and estimation of low-contrast nanostructures.

KW - Aperture probe

KW - High contrast imaging

KW - High resolution imaging

KW - Illumination-collection mode

KW - Nano-channel

KW - Near-field scanning optical microscope

KW - Optical interference

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M3 - Article

AN - SCOPUS:33846526114

SN - 1340-6000

VL - 13

SP - 266

EP - 268

JO - Optical Review

JF - Optical Review

IS - 4

ER -

High-contrast imaging of nano-channels using reflection near-field scanning optical microscope enhanced by optical interference

Abstract

Keywords

ASJC Scopus subject areas

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