High-efficiency mirror grinding of AlN by ultra-precision plane honing

Shinya Suzuki, Nobuhito Yoshihara, Jiwang Yan, Tsunemoto Kuriyagawa

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'High-efficiency mirror grinding of AlN by ultra-precision plane honing'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds