High-energy electron distribution in electron beam excited Ar/Kr and Ne/Xe mixtures

Fumihiko Kannari, W. D. Kimura

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

The electron energy distribution in electron beam (e beam) excited Ar/Kr and Ne/Xe gas mixtures is examined in detail. The binary rare-gas mixtures are similar to those used in excimer lasers. Cooling processes for the secondary electrons generated in the gas mixture plasma by the e beam are calculated using a reduced Boltzmann equation in which elastic and electron-electron collisions for electron energy distributions above the first excitation threshold of the rare gas are ignored. During the calculations for the Ar/Kr and Ne/Xe mixtures, all electron-related reactions and the interaction between the two different rare gases in the mixture are simultaneously considered. The high-energy secondary electrons produce a steady-state distribution within a very short time; however, it is found that the distribution is not Maxwellian. W values [eV/electron-ion pair] and yields of rare-gas excited states calculated from the steady-state high-energy electron distribution show a dependence on the mixture composition, especially for mixtures with low concentrations of the minor rare gas. This implies that the practice in excimer kinetics models of using the W values determined from pure rare gases is not entirely accurate.

Original languageEnglish
Pages (from-to)4377-4387
Number of pages11
JournalJournal of Applied Physics
Volume63
Issue number9
DOIs
Publication statusPublished - 1988
Externally publishedYes

Fingerprint

electron distribution
high energy electrons
rare gases
electron beams
gas mixtures
electrons
energy distribution
electron energy
excimers
excimer lasers
excitation
low concentrations
electron scattering
cooling
thresholds
kinetics
ions
interactions

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

High-energy electron distribution in electron beam excited Ar/Kr and Ne/Xe mixtures. / Kannari, Fumihiko; Kimura, W. D.

In: Journal of Applied Physics, Vol. 63, No. 9, 1988, p. 4377-4387.

Research output: Contribution to journalArticle

@article{d0eadbb91a1b4b4093d0b6f134e51d76,
title = "High-energy electron distribution in electron beam excited Ar/Kr and Ne/Xe mixtures",
abstract = "The electron energy distribution in electron beam (e beam) excited Ar/Kr and Ne/Xe gas mixtures is examined in detail. The binary rare-gas mixtures are similar to those used in excimer lasers. Cooling processes for the secondary electrons generated in the gas mixture plasma by the e beam are calculated using a reduced Boltzmann equation in which elastic and electron-electron collisions for electron energy distributions above the first excitation threshold of the rare gas are ignored. During the calculations for the Ar/Kr and Ne/Xe mixtures, all electron-related reactions and the interaction between the two different rare gases in the mixture are simultaneously considered. The high-energy secondary electrons produce a steady-state distribution within a very short time; however, it is found that the distribution is not Maxwellian. W values [eV/electron-ion pair] and yields of rare-gas excited states calculated from the steady-state high-energy electron distribution show a dependence on the mixture composition, especially for mixtures with low concentrations of the minor rare gas. This implies that the practice in excimer kinetics models of using the W values determined from pure rare gases is not entirely accurate.",
author = "Fumihiko Kannari and Kimura, {W. D.}",
year = "1988",
doi = "10.1063/1.340180",
language = "English",
volume = "63",
pages = "4377--4387",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "9",

}

TY - JOUR

T1 - High-energy electron distribution in electron beam excited Ar/Kr and Ne/Xe mixtures

AU - Kannari, Fumihiko

AU - Kimura, W. D.

PY - 1988

Y1 - 1988

N2 - The electron energy distribution in electron beam (e beam) excited Ar/Kr and Ne/Xe gas mixtures is examined in detail. The binary rare-gas mixtures are similar to those used in excimer lasers. Cooling processes for the secondary electrons generated in the gas mixture plasma by the e beam are calculated using a reduced Boltzmann equation in which elastic and electron-electron collisions for electron energy distributions above the first excitation threshold of the rare gas are ignored. During the calculations for the Ar/Kr and Ne/Xe mixtures, all electron-related reactions and the interaction between the two different rare gases in the mixture are simultaneously considered. The high-energy secondary electrons produce a steady-state distribution within a very short time; however, it is found that the distribution is not Maxwellian. W values [eV/electron-ion pair] and yields of rare-gas excited states calculated from the steady-state high-energy electron distribution show a dependence on the mixture composition, especially for mixtures with low concentrations of the minor rare gas. This implies that the practice in excimer kinetics models of using the W values determined from pure rare gases is not entirely accurate.

AB - The electron energy distribution in electron beam (e beam) excited Ar/Kr and Ne/Xe gas mixtures is examined in detail. The binary rare-gas mixtures are similar to those used in excimer lasers. Cooling processes for the secondary electrons generated in the gas mixture plasma by the e beam are calculated using a reduced Boltzmann equation in which elastic and electron-electron collisions for electron energy distributions above the first excitation threshold of the rare gas are ignored. During the calculations for the Ar/Kr and Ne/Xe mixtures, all electron-related reactions and the interaction between the two different rare gases in the mixture are simultaneously considered. The high-energy secondary electrons produce a steady-state distribution within a very short time; however, it is found that the distribution is not Maxwellian. W values [eV/electron-ion pair] and yields of rare-gas excited states calculated from the steady-state high-energy electron distribution show a dependence on the mixture composition, especially for mixtures with low concentrations of the minor rare gas. This implies that the practice in excimer kinetics models of using the W values determined from pure rare gases is not entirely accurate.

UR - http://www.scopus.com/inward/record.url?scp=0346640765&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0346640765&partnerID=8YFLogxK

U2 - 10.1063/1.340180

DO - 10.1063/1.340180

M3 - Article

VL - 63

SP - 4377

EP - 4387

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 9

ER -